10/7/2011	9:29:42 AM	Helium valve closed
10/7/2011	9:29:42 AM	SiCl4 pre valve closed
10/7/2011	9:30:14 AM	Main Vac valve closed
10/7/2011	9:30:36 AM	Main Vac valve opened
10/7/2011	9:31:31 AM	Main Vac valve closed
10/7/2011	9:31:32 AM	Helium valve opened
10/7/2011	9:31:33 AM	SiCl4 pre valve opened
10/7/2011	9:32:34 AM	Bypass valve opened
10/7/2011	9:32:42 AM	Bypass valve closed
10/7/2011	9:33:29 AM	Bypass valve opened
10/7/2011	9:33:40 AM	Bypass valve closed
10/7/2011	9:33:56 AM	Bypass valve opened
10/7/2011	9:35:28 AM	Bypass valve closed
10/7/2011	9:35:28 AM	Main Vac valve opened
10/7/2011	9:55:27 AM	Helium valve closed
10/7/2011	9:55:28 AM	SiCl4 pre valve closed
10/7/2011	9:55:59 AM	Main Vac valve closed
10/7/2011	9:56:01 AM	Helium valve opened
10/7/2011	9:56:02 AM	SiCl4 pre valve opened
10/7/2011	9:57:07 AM	Helium valve closed
10/7/2011	9:57:32 AM	SiCl4 pre valve closed
10/7/2011	9:57:50 AM	SiCl4 post valve closed
10/7/2011	9:59:07 AM	SiCl4 post valve opened
10/7/2011	9:59:57 AM	SiCl4 post valve closed
10/7/2011	10:00:07 AM	Bypass valve opened
10/7/2011	10:00:14 AM	SiCl4 MFC set to  0.000000
10/7/2011	10:00:17 AM	Helium MFC set to  0.000000
10/7/2011	10:01:53 AM	Bypass valve closed
10/7/2011	10:01:54 AM	Main Vac valve opened
10/7/2011	10:04:30 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/7/2011	10:04:30 AM	Recipe started at 10:04 AM
10/7/2011	10:04:30 AM	Helium valve closed
10/7/2011	10:04:30 AM	H2 valve closed
10/7/2011	10:04:30 AM	BCl3 valve closed
10/7/2011	10:04:30 AM	PH3 valve closed
10/7/2011	10:04:30 AM	SiCl4 pre valve closed
10/7/2011	10:04:30 AM	SiCl4 post valve closed
10/7/2011	10:04:30 AM	Main Vac valve closed
10/7/2011	10:04:30 AM	Bypass valve closed
10/7/2011	10:04:30 AM	Bubbler valve closed
10/7/2011	10:04:30 AM	Helium MFC set to  0.000000
10/7/2011	10:04:30 AM	H2 MFC set to  0.000000
10/7/2011	10:04:30 AM	BCl3 MFC set to  0.000000
10/7/2011	10:04:30 AM	PHl3 MFC set to  0.000000
10/7/2011	10:04:30 AM	SiCl4 MFC set to  0.000000
10/7/2011	10:04:30 AM	Bypass solenoid MFC set to  0.000000
10/7/2011	10:04:31 AM	Tube furnace set to 0
10/7/2011	10:04:34 AM	H2 valve closed
10/7/2011	10:04:34 AM	BCl3 valve closed
10/7/2011	10:04:34 AM	PH3 valve closed
10/7/2011	10:04:34 AM	SiCl4 pre valve closed
10/7/2011	10:04:34 AM	SiCl4 post valve closed
10/7/2011	10:04:34 AM	Main Vac valve closed
10/7/2011	10:04:34 AM	Bypass valve closed
10/7/2011	10:04:34 AM	Bubbler valve closed
10/7/2011	10:04:34 AM	Helium valve opened
10/7/2011	10:04:34 AM	Helium MFC set to  500.000000
10/7/2011	10:04:34 AM	H2 MFC set to  0.000000
10/7/2011	10:04:34 AM	BCl3 MFC set to  0.000000
10/7/2011	10:04:34 AM	PHl3 MFC set to  0.000000
10/7/2011	10:04:34 AM	SiCl4 MFC set to  0.000000
10/7/2011	10:04:34 AM	Bypass solenoid MFC set to  0.000000
10/7/2011	10:04:34 AM	Tube furnace set to 0
10/7/2011	10:05:56 AM	Helium valve closed
10/7/2011	10:05:56 AM	H2 valve closed
10/7/2011	10:05:56 AM	BCl3 valve closed
10/7/2011	10:05:56 AM	PH3 valve closed
10/7/2011	10:05:56 AM	SiCl4 pre valve closed
10/7/2011	10:05:56 AM	SiCl4 post valve closed
10/7/2011	10:05:56 AM	Main Vac valve closed
10/7/2011	10:05:56 AM	Bypass valve closed
10/7/2011	10:05:56 AM	Bubbler valve closed
10/7/2011	10:05:56 AM	Helium MFC set to  0.000000
10/7/2011	10:05:56 AM	H2 MFC set to  0.000000
10/7/2011	10:05:56 AM	BCl3 MFC set to  0.000000
10/7/2011	10:05:56 AM	PHl3 MFC set to  0.000000
10/7/2011	10:05:56 AM	SiCl4 MFC set to  0.000000
10/7/2011	10:05:56 AM	Bypass solenoid MFC set to  0.000000
10/7/2011	10:05:56 AM	Tube furnace set to 0
10/7/2011	10:05:57 AM	Run finished at 10:05 AM
10/7/2011	10:05:57 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/7/2011	10:07:48 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/7/2011	10:07:49 AM	Recipe started at 10:07 AM
10/7/2011	10:07:49 AM	Helium valve closed
10/7/2011	10:07:49 AM	H2 valve closed
10/7/2011	10:07:49 AM	BCl3 valve closed
10/7/2011	10:07:49 AM	PH3 valve closed
10/7/2011	10:07:49 AM	SiCl4 pre valve closed
10/7/2011	10:07:49 AM	SiCl4 post valve closed
10/7/2011	10:07:49 AM	Main Vac valve closed
10/7/2011	10:07:49 AM	Bubbler valve closed
10/7/2011	10:07:49 AM	Bypass valve opened
10/7/2011	10:07:49 AM	Helium MFC set to  0.000000
10/7/2011	10:07:49 AM	H2 MFC set to  0.000000
10/7/2011	10:07:49 AM	BCl3 MFC set to  0.000000
10/7/2011	10:07:49 AM	PHl3 MFC set to  0.000000
10/7/2011	10:07:49 AM	SiCl4 MFC set to  0.000000
10/7/2011	10:07:49 AM	Bypass solenoid MFC set to  0.000000
10/7/2011	10:07:49 AM	Tube furnace set to 0
10/7/2011	10:08:54 AM	Helium valve closed
10/7/2011	10:08:54 AM	H2 valve closed
10/7/2011	10:08:54 AM	BCl3 valve closed
10/7/2011	10:08:54 AM	PH3 valve closed
10/7/2011	10:08:54 AM	SiCl4 pre valve closed
10/7/2011	10:08:54 AM	SiCl4 post valve closed
10/7/2011	10:08:54 AM	Main Vac valve closed
10/7/2011	10:08:54 AM	Bubbler valve closed
10/7/2011	10:08:54 AM	Bypass valve opened
10/7/2011	10:08:54 AM	Helium MFC set to  0.000000
10/7/2011	10:08:54 AM	H2 MFC set to  0.000000
10/7/2011	10:08:54 AM	BCl3 MFC set to  0.000000
10/7/2011	10:08:54 AM	PHl3 MFC set to  0.000000
10/7/2011	10:08:54 AM	SiCl4 MFC set to  0.000000
10/7/2011	10:08:54 AM	Bypass solenoid MFC set to  0.000000
10/7/2011	10:08:54 AM	Tube furnace set to 0
10/7/2011	10:09:06 AM	Helium valve closed
10/7/2011	10:09:06 AM	H2 valve closed
10/7/2011	10:09:06 AM	BCl3 valve closed
10/7/2011	10:09:06 AM	PH3 valve closed
10/7/2011	10:09:06 AM	SiCl4 pre valve closed
10/7/2011	10:09:06 AM	SiCl4 post valve closed
10/7/2011	10:09:06 AM	Bypass valve closed
10/7/2011	10:09:06 AM	Bubbler valve closed
10/7/2011	10:09:06 AM	Main Vac valve opened
10/7/2011	10:09:06 AM	Helium MFC set to  0.000000
10/7/2011	10:09:06 AM	H2 MFC set to  0.000000
10/7/2011	10:09:06 AM	BCl3 MFC set to  0.000000
10/7/2011	10:09:06 AM	PHl3 MFC set to  0.000000
10/7/2011	10:09:06 AM	SiCl4 MFC set to  0.000000
10/7/2011	10:09:06 AM	Bypass solenoid MFC set to  0.000000
10/7/2011	10:09:06 AM	Tube furnace set to 0
10/7/2011	10:09:07 AM	Run finished at 10:09 AM
10/7/2011	10:09:07 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/7/2011	10:11:29 AM	Program started after a nonstandard shutdown
10/7/2011	10:11:29 AM	Helium valve closed
10/7/2011	10:11:29 AM	H2 valve closed
10/7/2011	10:11:29 AM	BCl3 valve closed
10/7/2011	10:11:29 AM	PH3 valve closed
10/7/2011	10:11:29 AM	SiCl4 pre valve closed
10/7/2011	10:11:29 AM	SiCl4 post valve closed
10/7/2011	10:11:29 AM	Main Vac valve closed
10/7/2011	10:11:29 AM	Bypass valve closed
10/7/2011	10:11:29 AM	Bubbler valve closed
10/7/2011	10:11:29 AM	Helium MFC set to  0.000000
10/7/2011	10:11:29 AM	H2 MFC set to  0.000000
10/7/2011	10:11:29 AM	BCl3 MFC set to  0.000000
10/7/2011	10:11:29 AM	PHl3 MFC set to  0.000000
10/7/2011	10:11:29 AM	SiCl4 MFC set to  0.000000
10/7/2011	10:11:29 AM	Bypass solenoid MFC set to  760.000000
10/7/2011	10:11:29 AM	Tube furnace set to 0
10/7/2011	10:11:34 AM	Main Vac valve opened
10/7/2011	10:54:06 AM	Main Vac valve closed
10/7/2011	10:54:11 AM	H2 MFC set to  15.000000
10/7/2011	10:54:12 AM	H2 valve opened
10/7/2011	10:54:22 AM	Bypass valve opened
10/7/2011	10:54:33 AM	Bypass valve closed
10/7/2011	10:54:36 AM	H2 valve closed
10/7/2011	10:54:41 AM	H2 MFC set to  20.000000
10/7/2011	10:54:42 AM	H2 valve opened
10/7/2011	10:54:49 AM	Bypass valve opened
10/7/2011	10:55:30 AM	H2 valve closed
10/7/2011	10:55:42 AM	Bypass valve closed
10/7/2011	10:55:46 AM	H2 MFC set to  200.000000
10/7/2011	10:55:47 AM	H2 valve opened
10/7/2011	10:56:24 AM	H2 valve closed
10/7/2011	10:56:26 AM	Bypass valve opened
10/7/2011	10:57:09 AM	Bypass valve closed
10/7/2011	10:57:09 AM	Main Vac valve opened
10/7/2011	10:59:21 AM	Main Vac valve closed
10/7/2011	10:59:26 AM	H2 MFC set to  500.000000
10/7/2011	10:59:27 AM	H2 valve opened
10/7/2011	11:00:28 AM	H2 valve closed
10/7/2011	11:00:29 AM	Bypass valve opened
10/7/2011	11:01:24 AM	Bypass valve closed
10/7/2011	11:01:25 AM	Main Vac valve opened
10/7/2011	11:06:46 AM	Main Vac valve closed
10/7/2011	11:07:01 AM	Main Vac valve opened
10/7/2011	11:07:07 AM	Main Vac valve closed
10/7/2011	11:07:08 AM	H2 valve opened
10/7/2011	11:08:06 AM	H2 valve closed
10/7/2011	11:08:08 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/7/2011	11:08:09 AM	Recipe started at 11:08 AM
10/7/2011	11:08:09 AM	Helium valve closed
10/7/2011	11:08:09 AM	H2 valve closed
10/7/2011	11:08:09 AM	BCl3 valve closed
10/7/2011	11:08:09 AM	PH3 valve closed
10/7/2011	11:08:09 AM	SiCl4 pre valve closed
10/7/2011	11:08:09 AM	SiCl4 post valve closed
10/7/2011	11:08:09 AM	Main Vac valve closed
10/7/2011	11:08:09 AM	Bubbler valve closed
10/7/2011	11:08:09 AM	Bypass valve opened
10/7/2011	11:08:09 AM	Helium MFC set to  0.000000
10/7/2011	11:08:09 AM	H2 MFC set to  0.000000
10/7/2011	11:08:09 AM	BCl3 MFC set to  0.000000
10/7/2011	11:08:09 AM	PHl3 MFC set to  0.000000
10/7/2011	11:08:09 AM	SiCl4 MFC set to  0.000000
10/7/2011	11:08:09 AM	Bypass solenoid MFC set to  0.000000
10/7/2011	11:08:09 AM	Tube furnace set to 0
10/7/2011	11:08:48 AM	Helium valve closed
10/7/2011	11:08:48 AM	H2 valve closed
10/7/2011	11:08:48 AM	BCl3 valve closed
10/7/2011	11:08:48 AM	PH3 valve closed
10/7/2011	11:08:48 AM	SiCl4 pre valve closed
10/7/2011	11:08:48 AM	SiCl4 post valve closed
10/7/2011	11:08:48 AM	Main Vac valve closed
10/7/2011	11:08:48 AM	Bubbler valve closed
10/7/2011	11:08:48 AM	Bypass valve opened
10/7/2011	11:08:48 AM	Helium MFC set to  0.000000
10/7/2011	11:08:48 AM	H2 MFC set to  0.000000
10/7/2011	11:08:48 AM	BCl3 MFC set to  0.000000
10/7/2011	11:08:48 AM	PHl3 MFC set to  0.000000
10/7/2011	11:08:48 AM	SiCl4 MFC set to  0.000000
10/7/2011	11:08:48 AM	Bypass solenoid MFC set to  0.000000
10/7/2011	11:08:48 AM	Tube furnace set to 0
10/7/2011	11:09:02 AM	Helium valve closed
10/7/2011	11:09:02 AM	H2 valve closed
10/7/2011	11:09:02 AM	BCl3 valve closed
10/7/2011	11:09:02 AM	PH3 valve closed
10/7/2011	11:09:02 AM	SiCl4 pre valve closed
10/7/2011	11:09:02 AM	SiCl4 post valve closed
10/7/2011	11:09:02 AM	Bypass valve closed
10/7/2011	11:09:02 AM	Bubbler valve closed
10/7/2011	11:09:02 AM	Main Vac valve opened
10/7/2011	11:09:02 AM	Helium MFC set to  0.000000
10/7/2011	11:09:02 AM	H2 MFC set to  0.000000
10/7/2011	11:09:02 AM	BCl3 MFC set to  0.000000
10/7/2011	11:09:02 AM	PHl3 MFC set to  0.000000
10/7/2011	11:09:02 AM	SiCl4 MFC set to  0.000000
10/7/2011	11:09:02 AM	Bypass solenoid MFC set to  0.000000
10/7/2011	11:09:02 AM	Tube furnace set to 0
10/7/2011	11:09:03 AM	Run finished at 11:09 AM
10/7/2011	11:09:03 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/7/2011	11:14:22 AM	Recipe started at 11:14 AM
10/7/2011	11:14:22 AM	Helium valve closed
10/7/2011	11:14:22 AM	H2 valve closed
10/7/2011	11:14:22 AM	BCl3 valve closed
10/7/2011	11:14:22 AM	PH3 valve closed
10/7/2011	11:14:22 AM	SiCl4 pre valve closed
10/7/2011	11:14:22 AM	SiCl4 post valve closed
10/7/2011	11:14:22 AM	Main Vac valve closed
10/7/2011	11:14:22 AM	Bypass valve closed
10/7/2011	11:14:22 AM	Bubbler valve closed
10/7/2011	11:14:22 AM	Helium MFC set to  0.000000
10/7/2011	11:14:22 AM	H2 MFC set to  0.000000
10/7/2011	11:14:22 AM	BCl3 MFC set to  0.000000
10/7/2011	11:14:22 AM	PHl3 MFC set to  0.000000
10/7/2011	11:14:22 AM	SiCl4 MFC set to  0.000000
10/7/2011	11:14:22 AM	Bypass solenoid MFC set to  0.000000
10/7/2011	11:14:22 AM	Tube furnace set to 0
10/7/2011	11:14:25 AM	Helium valve closed
10/7/2011	11:14:25 AM	BCl3 valve closed
10/7/2011	11:14:25 AM	PH3 valve closed
10/7/2011	11:14:25 AM	SiCl4 pre valve closed
10/7/2011	11:14:25 AM	SiCl4 post valve closed
10/7/2011	11:14:25 AM	Main Vac valve closed
10/7/2011	11:14:25 AM	Bypass valve closed
10/7/2011	11:14:25 AM	Bubbler valve closed
10/7/2011	11:14:25 AM	H2 valve opened
10/7/2011	11:14:25 AM	Helium MFC set to  0.000000
10/7/2011	11:14:25 AM	H2 MFC set to  500.000000
10/7/2011	11:14:25 AM	BCl3 MFC set to  0.000000
10/7/2011	11:14:25 AM	PHl3 MFC set to  0.000000
10/7/2011	11:14:25 AM	SiCl4 MFC set to  0.000000
10/7/2011	11:14:25 AM	Bypass solenoid MFC set to  0.000000
10/7/2011	11:14:25 AM	Tube furnace set to 0
10/7/2011	11:15:34 AM	Helium valve closed
10/7/2011	11:15:34 AM	BCl3 valve closed
10/7/2011	11:15:34 AM	PH3 valve closed
10/7/2011	11:15:34 AM	SiCl4 pre valve closed
10/7/2011	11:15:34 AM	SiCl4 post valve closed
10/7/2011	11:15:34 AM	Main Vac valve closed
10/7/2011	11:15:34 AM	Bypass valve closed
10/7/2011	11:15:34 AM	H2 valve opened
10/7/2011	11:15:34 AM	Bubbler valve opened
10/7/2011	11:15:34 AM	Helium MFC set to  0.000000
10/7/2011	11:15:34 AM	H2 MFC set to  500.000000
10/7/2011	11:15:34 AM	BCl3 MFC set to  0.000000
10/7/2011	11:15:34 AM	PHl3 MFC set to  0.000000
10/7/2011	11:15:34 AM	SiCl4 MFC set to  0.000000
10/7/2011	11:15:34 AM	Bypass solenoid MFC set to  0.000000
10/7/2011	11:15:35 AM	Tube furnace set to 0
10/7/2011	11:15:36 AM	Helium valve closed
10/7/2011	11:15:36 AM	BCl3 valve closed
10/7/2011	11:15:36 AM	PH3 valve closed
10/7/2011	11:15:36 AM	SiCl4 pre valve closed
10/7/2011	11:15:36 AM	SiCl4 post valve closed
10/7/2011	11:15:36 AM	Main Vac valve closed
10/7/2011	11:15:36 AM	Bypass valve closed
10/7/2011	11:15:36 AM	H2 valve opened
10/7/2011	11:15:36 AM	Bubbler valve opened
10/7/2011	11:15:36 AM	Helium MFC set to  0.000000
10/7/2011	11:15:36 AM	H2 MFC set to  500.000000
10/7/2011	11:15:36 AM	BCl3 MFC set to  0.000000
10/7/2011	11:15:36 AM	PHl3 MFC set to  0.000000
10/7/2011	11:15:36 AM	SiCl4 MFC set to  0.000000
10/7/2011	11:15:36 AM	Bypass solenoid MFC set to  0.000000
10/7/2011	11:15:36 AM	Tube furnace set to 1000
10/7/2011	11:35:36 AM	Helium valve closed
10/7/2011	11:35:36 AM	BCl3 valve closed
10/7/2011	11:35:36 AM	PH3 valve closed
10/7/2011	11:35:36 AM	Main Vac valve closed
10/7/2011	11:35:36 AM	Bypass valve closed
10/7/2011	11:35:36 AM	H2 valve opened
10/7/2011	11:35:36 AM	SiCl4 pre valve opened
10/7/2011	11:35:36 AM	SiCl4 post valve opened
10/7/2011	11:35:36 AM	Bubbler valve opened
10/7/2011	11:35:36 AM	Helium MFC set to  0.000000
10/7/2011	11:35:36 AM	H2 MFC set to  500.000000
10/7/2011	11:35:36 AM	BCl3 MFC set to  0.000000
10/7/2011	11:35:36 AM	PHl3 MFC set to  0.000000
10/7/2011	11:35:36 AM	SiCl4 MFC set to  50.000000
10/7/2011	11:35:36 AM	Bypass solenoid MFC set to  0.000000
10/7/2011	11:35:36 AM	Tube furnace set to 1000
10/7/2011	12:15:36 PM	Helium valve closed
10/7/2011	12:15:36 PM	BCl3 valve closed
10/7/2011	12:15:36 PM	PH3 valve closed
10/7/2011	12:15:36 PM	SiCl4 pre valve closed
10/7/2011	12:15:36 PM	SiCl4 post valve closed
10/7/2011	12:15:36 PM	Main Vac valve closed
10/7/2011	12:15:36 PM	Bypass valve closed
10/7/2011	12:15:36 PM	H2 valve opened
10/7/2011	12:15:36 PM	Bubbler valve opened
10/7/2011	12:15:36 PM	Helium MFC set to  0.000000
10/7/2011	12:15:36 PM	H2 MFC set to  500.000000
10/7/2011	12:15:36 PM	BCl3 MFC set to  0.000000
10/7/2011	12:15:36 PM	PHl3 MFC set to  0.000000
10/7/2011	12:15:36 PM	SiCl4 MFC set to  0.000000
10/7/2011	12:15:36 PM	Bypass solenoid MFC set to  0.000000
10/7/2011	12:15:36 PM	Tube furnace set to 950
10/7/2011	12:16:11 PM	Helium valve closed
10/7/2011	12:16:11 PM	BCl3 valve closed
10/7/2011	12:16:11 PM	PH3 valve closed
10/7/2011	12:16:11 PM	SiCl4 pre valve closed
10/7/2011	12:16:11 PM	SiCl4 post valve closed
10/7/2011	12:16:11 PM	Main Vac valve closed
10/7/2011	12:16:11 PM	Bypass valve closed
10/7/2011	12:16:11 PM	H2 valve opened
10/7/2011	12:16:11 PM	Bubbler valve opened
10/7/2011	12:16:11 PM	Helium MFC set to  0.000000
10/7/2011	12:16:11 PM	H2 MFC set to  500.000000
10/7/2011	12:16:11 PM	BCl3 MFC set to  0.000000
10/7/2011	12:16:11 PM	PHl3 MFC set to  0.000000
10/7/2011	12:16:11 PM	SiCl4 MFC set to  0.000000
10/7/2011	12:16:11 PM	Bypass solenoid MFC set to  0.000000
10/7/2011	12:16:12 PM	Tube furnace set to 850
10/7/2011	12:17:20 PM	H2 valve closed
10/7/2011	12:17:20 PM	BCl3 valve closed
10/7/2011	12:17:20 PM	PH3 valve closed
10/7/2011	12:17:20 PM	SiCl4 pre valve closed
10/7/2011	12:17:20 PM	SiCl4 post valve closed
10/7/2011	12:17:20 PM	Main Vac valve closed
10/7/2011	12:17:20 PM	Bypass valve closed
10/7/2011	12:17:20 PM	Helium valve opened
10/7/2011	12:17:20 PM	Bubbler valve opened
10/7/2011	12:17:20 PM	Helium MFC set to  500.000000
10/7/2011	12:17:20 PM	H2 MFC set to  0.000000
10/7/2011	12:17:20 PM	BCl3 MFC set to  0.000000
10/7/2011	12:17:20 PM	PHl3 MFC set to  0.000000
10/7/2011	12:17:20 PM	SiCl4 MFC set to  0.000000
10/7/2011	12:17:20 PM	Bypass solenoid MFC set to  0.000000
10/7/2011	12:17:21 PM	Tube furnace set to 0
10/7/2011	12:26:40 PM	Helium valve closed
10/7/2011	12:26:40 PM	H2 valve closed
10/7/2011	12:26:40 PM	BCl3 valve closed
10/7/2011	12:26:40 PM	PH3 valve closed
10/7/2011	12:26:40 PM	SiCl4 pre valve closed
10/7/2011	12:26:40 PM	SiCl4 post valve closed
10/7/2011	12:26:40 PM	Main Vac valve closed
10/7/2011	12:26:40 PM	Bypass valve closed
10/7/2011	12:26:40 PM	Bubbler valve closed
10/7/2011	12:26:40 PM	Helium MFC set to  0.000000
10/7/2011	12:26:40 PM	H2 MFC set to  0.000000
10/7/2011	12:26:40 PM	BCl3 MFC set to  0.000000
10/7/2011	12:26:40 PM	PHl3 MFC set to  0.000000
10/7/2011	12:26:40 PM	SiCl4 MFC set to  0.000000
10/7/2011	12:26:40 PM	Bypass solenoid MFC set to  0.000000
10/7/2011	12:26:40 PM	Tube furnace set to 0
10/7/2011	12:26:41 PM	Run finished at 12:26 PM
10/7/2011	12:26:44 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/7/2011	12:26:45 PM	Recipe started at 12:26 PM
10/7/2011	12:26:45 PM	Helium valve closed
10/7/2011	12:26:45 PM	H2 valve closed
10/7/2011	12:26:45 PM	BCl3 valve closed
10/7/2011	12:26:45 PM	PH3 valve closed
10/7/2011	12:26:45 PM	SiCl4 pre valve closed
10/7/2011	12:26:45 PM	SiCl4 post valve closed
10/7/2011	12:26:45 PM	Main Vac valve closed
10/7/2011	12:26:45 PM	Bubbler valve closed
10/7/2011	12:26:45 PM	Bypass valve opened
10/7/2011	12:26:45 PM	Helium MFC set to  0.000000
10/7/2011	12:26:45 PM	H2 MFC set to  0.000000
10/7/2011	12:26:45 PM	BCl3 MFC set to  0.000000
10/7/2011	12:26:45 PM	PHl3 MFC set to  0.000000
10/7/2011	12:26:45 PM	SiCl4 MFC set to  0.000000
10/7/2011	12:26:45 PM	Bypass solenoid MFC set to  0.000000
10/7/2011	12:26:45 PM	Tube furnace set to 0
10/7/2011	12:27:39 PM	Helium valve closed
10/7/2011	12:27:39 PM	H2 valve closed
10/7/2011	12:27:39 PM	BCl3 valve closed
10/7/2011	12:27:39 PM	PH3 valve closed
10/7/2011	12:27:39 PM	SiCl4 pre valve closed
10/7/2011	12:27:39 PM	SiCl4 post valve closed
10/7/2011	12:27:39 PM	Main Vac valve closed
10/7/2011	12:27:39 PM	Bubbler valve closed
10/7/2011	12:27:39 PM	Bypass valve opened
10/7/2011	12:27:39 PM	Helium MFC set to  0.000000
10/7/2011	12:27:39 PM	H2 MFC set to  0.000000
10/7/2011	12:27:39 PM	BCl3 MFC set to  0.000000
10/7/2011	12:27:39 PM	PHl3 MFC set to  0.000000
10/7/2011	12:27:39 PM	SiCl4 MFC set to  0.000000
10/7/2011	12:27:39 PM	Bypass solenoid MFC set to  0.000000
10/7/2011	12:27:39 PM	Tube furnace set to 0
10/7/2011	12:28:16 PM	Helium valve closed
10/7/2011	12:28:16 PM	H2 valve closed
10/7/2011	12:28:16 PM	BCl3 valve closed
10/7/2011	12:28:16 PM	PH3 valve closed
10/7/2011	12:28:16 PM	SiCl4 pre valve closed
10/7/2011	12:28:16 PM	SiCl4 post valve closed
10/7/2011	12:28:16 PM	Bypass valve closed
10/7/2011	12:28:16 PM	Bubbler valve closed
10/7/2011	12:28:16 PM	Main Vac valve opened
10/7/2011	12:28:16 PM	Helium MFC set to  0.000000
10/7/2011	12:28:16 PM	H2 MFC set to  0.000000
10/7/2011	12:28:16 PM	BCl3 MFC set to  0.000000
10/7/2011	12:28:16 PM	PHl3 MFC set to  0.000000
10/7/2011	12:28:16 PM	SiCl4 MFC set to  0.000000
10/7/2011	12:28:16 PM	Bypass solenoid MFC set to  0.000000
10/7/2011	12:28:17 PM	Tube furnace set to 0
10/7/2011	12:28:18 PM	Run finished at 12:28 PM
10/7/2011	12:28:18 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/7/2011	1:03:42 PM	Main Vac valve closed
10/7/2011	1:03:57 PM	Main Vac valve opened
10/7/2011	1:10:31 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/7/2011	1:10:43 PM	Recipe started at 1:10 PM
10/7/2011	1:10:43 PM	Helium valve closed
10/7/2011	1:10:43 PM	H2 valve closed
10/7/2011	1:10:43 PM	BCl3 valve closed
10/7/2011	1:10:43 PM	PH3 valve closed
10/7/2011	1:10:43 PM	SiCl4 pre valve closed
10/7/2011	1:10:43 PM	SiCl4 post valve closed
10/7/2011	1:10:43 PM	Main Vac valve closed
10/7/2011	1:10:43 PM	Bubbler valve closed
10/7/2011	1:10:44 PM	Bypass valve opened
10/7/2011	1:10:44 PM	Helium MFC set to  0.000000
10/7/2011	1:10:44 PM	H2 MFC set to  0.000000
10/7/2011	1:10:44 PM	BCl3 MFC set to  0.000000
10/7/2011	1:10:44 PM	PHl3 MFC set to  0.000000
10/7/2011	1:10:44 PM	SiCl4 MFC set to  0.000000
10/7/2011	1:10:44 PM	Bypass solenoid MFC set to  0.000000
10/7/2011	1:10:44 PM	Tube furnace set to 0
10/7/2011	1:10:44 PM	Helium valve closed
10/7/2011	1:10:44 PM	H2 valve closed
10/7/2011	1:10:44 PM	BCl3 valve closed
10/7/2011	1:10:44 PM	PH3 valve closed
10/7/2011	1:10:44 PM	SiCl4 pre valve closed
10/7/2011	1:10:44 PM	SiCl4 post valve closed
10/7/2011	1:10:44 PM	Main Vac valve closed
10/7/2011	1:10:44 PM	Bubbler valve closed
10/7/2011	1:10:44 PM	Bypass valve opened
10/7/2011	1:10:44 PM	Helium MFC set to  0.000000
10/7/2011	1:10:44 PM	H2 MFC set to  0.000000
10/7/2011	1:10:44 PM	BCl3 MFC set to  0.000000
10/7/2011	1:10:44 PM	PHl3 MFC set to  0.000000
10/7/2011	1:10:44 PM	SiCl4 MFC set to  0.000000
10/7/2011	1:10:44 PM	Bypass solenoid MFC set to  0.000000
10/7/2011	1:10:44 PM	Tube furnace set to 0
10/7/2011	1:10:48 PM	Helium valve closed
10/7/2011	1:10:48 PM	H2 valve closed
10/7/2011	1:10:48 PM	BCl3 valve closed
10/7/2011	1:10:48 PM	PH3 valve closed
10/7/2011	1:10:48 PM	SiCl4 pre valve closed
10/7/2011	1:10:48 PM	SiCl4 post valve closed
10/7/2011	1:10:48 PM	Bypass valve closed
10/7/2011	1:10:48 PM	Bubbler valve closed
10/7/2011	1:10:48 PM	Main Vac valve opened
10/7/2011	1:10:48 PM	Helium MFC set to  0.000000
10/7/2011	1:10:48 PM	H2 MFC set to  0.000000
10/7/2011	1:10:48 PM	BCl3 MFC set to  0.000000
10/7/2011	1:10:48 PM	PHl3 MFC set to  0.000000
10/7/2011	1:10:48 PM	SiCl4 MFC set to  0.000000
10/7/2011	1:10:48 PM	Bypass solenoid MFC set to  0.000000
10/7/2011	1:10:48 PM	Tube furnace set to 0
10/7/2011	1:11:18 PM	H2 valve closed
10/7/2011	1:11:18 PM	BCl3 valve closed
10/7/2011	1:11:18 PM	PH3 valve closed
10/7/2011	1:11:18 PM	SiCl4 pre valve closed
10/7/2011	1:11:18 PM	SiCl4 post valve closed
10/7/2011	1:11:18 PM	Bypass valve closed
10/7/2011	1:11:18 PM	Bubbler valve closed
10/7/2011	1:11:18 PM	Helium valve opened
10/7/2011	1:11:18 PM	Main Vac valve opened
10/7/2011	1:11:18 PM	Helium MFC set to  20.000000
10/7/2011	1:11:18 PM	H2 MFC set to  0.000000
10/7/2011	1:11:18 PM	BCl3 MFC set to  0.000000
10/7/2011	1:11:18 PM	PHl3 MFC set to  0.000000
10/7/2011	1:11:18 PM	SiCl4 MFC set to  0.000000
10/7/2011	1:11:18 PM	Bypass solenoid MFC set to  0.000000
10/7/2011	1:11:18 PM	Tube furnace set to 0
10/7/2011	1:11:48 PM	Helium valve closed
10/7/2011	1:11:48 PM	H2 valve closed
10/7/2011	1:11:48 PM	BCl3 valve closed
10/7/2011	1:11:48 PM	PH3 valve closed
10/7/2011	1:11:48 PM	SiCl4 pre valve closed
10/7/2011	1:11:48 PM	SiCl4 post valve closed
10/7/2011	1:11:48 PM	Bypass valve closed
10/7/2011	1:11:48 PM	Bubbler valve closed
10/7/2011	1:11:48 PM	Main Vac valve opened
10/7/2011	1:11:48 PM	Helium MFC set to  0.000000
10/7/2011	1:11:48 PM	H2 MFC set to  0.000000
10/7/2011	1:11:48 PM	BCl3 MFC set to  0.000000
10/7/2011	1:11:48 PM	PHl3 MFC set to  0.000000
10/7/2011	1:11:48 PM	SiCl4 MFC set to  0.000000
10/7/2011	1:11:48 PM	Bypass solenoid MFC set to  0.000000
10/7/2011	1:11:48 PM	Tube furnace set to 0
10/7/2011	1:12:19 PM	H2 valve closed
10/7/2011	1:12:19 PM	BCl3 valve closed
10/7/2011	1:12:19 PM	PH3 valve closed
10/7/2011	1:12:19 PM	SiCl4 pre valve closed
10/7/2011	1:12:19 PM	SiCl4 post valve closed
10/7/2011	1:12:19 PM	Bypass valve closed
10/7/2011	1:12:19 PM	Bubbler valve closed
10/7/2011	1:12:19 PM	Helium valve opened
10/7/2011	1:12:19 PM	Main Vac valve opened
10/7/2011	1:12:19 PM	Helium MFC set to  20.000000
10/7/2011	1:12:19 PM	H2 MFC set to  0.000000
10/7/2011	1:12:19 PM	BCl3 MFC set to  0.000000
10/7/2011	1:12:19 PM	PHl3 MFC set to  0.000000
10/7/2011	1:12:19 PM	SiCl4 MFC set to  0.000000
10/7/2011	1:12:19 PM	Bypass solenoid MFC set to  0.000000
10/7/2011	1:12:19 PM	Tube furnace set to 0
10/7/2011	1:12:49 PM	Helium valve closed
10/7/2011	1:12:49 PM	H2 valve closed
10/7/2011	1:12:49 PM	BCl3 valve closed
10/7/2011	1:12:49 PM	PH3 valve closed
10/7/2011	1:12:49 PM	SiCl4 pre valve closed
10/7/2011	1:12:49 PM	SiCl4 post valve closed
10/7/2011	1:12:49 PM	Bypass valve closed
10/7/2011	1:12:49 PM	Bubbler valve closed
10/7/2011	1:12:49 PM	Main Vac valve opened
10/7/2011	1:12:49 PM	Helium MFC set to  0.000000
10/7/2011	1:12:49 PM	H2 MFC set to  0.000000
10/7/2011	1:12:49 PM	BCl3 MFC set to  0.000000
10/7/2011	1:12:49 PM	PHl3 MFC set to  0.000000
10/7/2011	1:12:49 PM	SiCl4 MFC set to  0.000000
10/7/2011	1:12:49 PM	Bypass solenoid MFC set to  0.000000
10/7/2011	1:12:49 PM	Tube furnace set to 0
10/7/2011	1:13:19 PM	H2 valve closed
10/7/2011	1:13:19 PM	BCl3 valve closed
10/7/2011	1:13:19 PM	PH3 valve closed
10/7/2011	1:13:19 PM	SiCl4 pre valve closed
10/7/2011	1:13:19 PM	SiCl4 post valve closed
10/7/2011	1:13:19 PM	Bypass valve closed
10/7/2011	1:13:19 PM	Bubbler valve closed
10/7/2011	1:13:19 PM	Helium valve opened
10/7/2011	1:13:19 PM	Main Vac valve opened
10/7/2011	1:13:19 PM	Helium MFC set to  20.000000
10/7/2011	1:13:19 PM	H2 MFC set to  0.000000
10/7/2011	1:13:19 PM	BCl3 MFC set to  0.000000
10/7/2011	1:13:19 PM	PHl3 MFC set to  0.000000
10/7/2011	1:13:19 PM	SiCl4 MFC set to  0.000000
10/7/2011	1:13:19 PM	Bypass solenoid MFC set to  0.000000
10/7/2011	1:13:19 PM	Tube furnace set to 0
10/7/2011	1:13:49 PM	Helium valve closed
10/7/2011	1:13:49 PM	H2 valve closed
10/7/2011	1:13:49 PM	BCl3 valve closed
10/7/2011	1:13:49 PM	PH3 valve closed
10/7/2011	1:13:49 PM	SiCl4 pre valve closed
10/7/2011	1:13:49 PM	SiCl4 post valve closed
10/7/2011	1:13:49 PM	Bypass valve closed
10/7/2011	1:13:49 PM	Bubbler valve closed
10/7/2011	1:13:49 PM	Main Vac valve opened
10/7/2011	1:13:49 PM	Helium MFC set to  0.000000
10/7/2011	1:13:49 PM	H2 MFC set to  0.000000
10/7/2011	1:13:49 PM	BCl3 MFC set to  0.000000
10/7/2011	1:13:49 PM	PHl3 MFC set to  0.000000
10/7/2011	1:13:49 PM	SiCl4 MFC set to  0.000000
10/7/2011	1:13:49 PM	Bypass solenoid MFC set to  0.000000
10/7/2011	1:13:49 PM	Tube furnace set to 0
10/7/2011	1:14:19 PM	H2 valve closed
10/7/2011	1:14:19 PM	BCl3 valve closed
10/7/2011	1:14:19 PM	PH3 valve closed
10/7/2011	1:14:19 PM	SiCl4 pre valve closed
10/7/2011	1:14:19 PM	SiCl4 post valve closed
10/7/2011	1:14:19 PM	Bypass valve closed
10/7/2011	1:14:19 PM	Bubbler valve closed
10/7/2011	1:14:19 PM	Helium valve opened
10/7/2011	1:14:19 PM	Main Vac valve opened
10/7/2011	1:14:19 PM	Helium MFC set to  20.000000
10/7/2011	1:14:19 PM	H2 MFC set to  0.000000
10/7/2011	1:14:19 PM	BCl3 MFC set to  0.000000
10/7/2011	1:14:19 PM	PHl3 MFC set to  0.000000
10/7/2011	1:14:19 PM	SiCl4 MFC set to  0.000000
10/7/2011	1:14:19 PM	Bypass solenoid MFC set to  0.000000
10/7/2011	1:14:20 PM	Tube furnace set to 0
10/7/2011	1:14:50 PM	Helium valve closed
10/7/2011	1:14:50 PM	H2 valve closed
10/7/2011	1:14:50 PM	BCl3 valve closed
10/7/2011	1:14:50 PM	PH3 valve closed
10/7/2011	1:14:50 PM	SiCl4 pre valve closed
10/7/2011	1:14:50 PM	SiCl4 post valve closed
10/7/2011	1:14:50 PM	Bypass valve closed
10/7/2011	1:14:50 PM	Bubbler valve closed
10/7/2011	1:14:50 PM	Main Vac valve opened
10/7/2011	1:14:50 PM	Helium MFC set to  0.000000
10/7/2011	1:14:50 PM	H2 MFC set to  0.000000
10/7/2011	1:14:50 PM	BCl3 MFC set to  0.000000
10/7/2011	1:14:50 PM	PHl3 MFC set to  0.000000
10/7/2011	1:14:50 PM	SiCl4 MFC set to  0.000000
10/7/2011	1:14:50 PM	Bypass solenoid MFC set to  0.000000
10/7/2011	1:14:50 PM	Tube furnace set to 0
10/7/2011	1:15:20 PM	H2 valve closed
10/7/2011	1:15:20 PM	BCl3 valve closed
10/7/2011	1:15:20 PM	PH3 valve closed
10/7/2011	1:15:20 PM	SiCl4 pre valve closed
10/7/2011	1:15:20 PM	SiCl4 post valve closed
10/7/2011	1:15:20 PM	Bypass valve closed
10/7/2011	1:15:20 PM	Bubbler valve closed
10/7/2011	1:15:20 PM	Helium valve opened
10/7/2011	1:15:20 PM	Main Vac valve opened
10/7/2011	1:15:20 PM	Helium MFC set to  20.000000
10/7/2011	1:15:20 PM	H2 MFC set to  0.000000
10/7/2011	1:15:20 PM	BCl3 MFC set to  0.000000
10/7/2011	1:15:20 PM	PHl3 MFC set to  0.000000
10/7/2011	1:15:20 PM	SiCl4 MFC set to  0.000000
10/7/2011	1:15:20 PM	Bypass solenoid MFC set to  0.000000
10/7/2011	1:15:20 PM	Tube furnace set to 0
10/7/2011	1:15:50 PM	Helium valve closed
10/7/2011	1:15:50 PM	H2 valve closed
10/7/2011	1:15:50 PM	BCl3 valve closed
10/7/2011	1:15:50 PM	PH3 valve closed
10/7/2011	1:15:50 PM	SiCl4 pre valve closed
10/7/2011	1:15:50 PM	SiCl4 post valve closed
10/7/2011	1:15:50 PM	Bypass valve closed
10/7/2011	1:15:50 PM	Bubbler valve closed
10/7/2011	1:15:50 PM	Main Vac valve opened
10/7/2011	1:15:50 PM	Helium MFC set to  0.000000
10/7/2011	1:15:50 PM	H2 MFC set to  0.000000
10/7/2011	1:15:50 PM	BCl3 MFC set to  0.000000
10/7/2011	1:15:50 PM	PHl3 MFC set to  0.000000
10/7/2011	1:15:50 PM	SiCl4 MFC set to  0.000000
10/7/2011	1:15:50 PM	Bypass solenoid MFC set to  0.000000
10/7/2011	1:15:50 PM	Tube furnace set to 0
10/7/2011	1:16:20 PM	H2 valve closed
10/7/2011	1:16:20 PM	BCl3 valve closed
10/7/2011	1:16:20 PM	PH3 valve closed
10/7/2011	1:16:20 PM	SiCl4 pre valve closed
10/7/2011	1:16:20 PM	SiCl4 post valve closed
10/7/2011	1:16:20 PM	Bypass valve closed
10/7/2011	1:16:20 PM	Bubbler valve closed
10/7/2011	1:16:20 PM	Helium valve opened
10/7/2011	1:16:20 PM	Main Vac valve opened
10/7/2011	1:16:20 PM	Helium MFC set to  20.000000
10/7/2011	1:16:20 PM	H2 MFC set to  0.000000
10/7/2011	1:16:20 PM	BCl3 MFC set to  0.000000
10/7/2011	1:16:20 PM	PHl3 MFC set to  0.000000
10/7/2011	1:16:20 PM	SiCl4 MFC set to  0.000000
10/7/2011	1:16:20 PM	Bypass solenoid MFC set to  0.000000
10/7/2011	1:16:20 PM	Tube furnace set to 0
10/7/2011	1:16:50 PM	Helium valve closed
10/7/2011	1:16:50 PM	H2 valve closed
10/7/2011	1:16:50 PM	BCl3 valve closed
10/7/2011	1:16:50 PM	PH3 valve closed
10/7/2011	1:16:50 PM	SiCl4 pre valve closed
10/7/2011	1:16:50 PM	SiCl4 post valve closed
10/7/2011	1:16:50 PM	Bypass valve closed
10/7/2011	1:16:50 PM	Bubbler valve closed
10/7/2011	1:16:50 PM	Main Vac valve opened
10/7/2011	1:16:50 PM	Helium MFC set to  0.000000
10/7/2011	1:16:50 PM	H2 MFC set to  0.000000
10/7/2011	1:16:50 PM	BCl3 MFC set to  0.000000
10/7/2011	1:16:50 PM	PHl3 MFC set to  0.000000
10/7/2011	1:16:50 PM	SiCl4 MFC set to  0.000000
10/7/2011	1:16:50 PM	Bypass solenoid MFC set to  0.000000
10/7/2011	1:16:51 PM	Tube furnace set to 0
10/7/2011	1:17:21 PM	H2 valve closed
10/7/2011	1:17:21 PM	BCl3 valve closed
10/7/2011	1:17:21 PM	PH3 valve closed
10/7/2011	1:17:21 PM	SiCl4 pre valve closed
10/7/2011	1:17:21 PM	SiCl4 post valve closed
10/7/2011	1:17:21 PM	Bypass valve closed
10/7/2011	1:17:21 PM	Bubbler valve closed
10/7/2011	1:17:21 PM	Helium valve opened
10/7/2011	1:17:21 PM	Main Vac valve opened
10/7/2011	1:17:21 PM	Helium MFC set to  20.000000
10/7/2011	1:17:21 PM	H2 MFC set to  0.000000
10/7/2011	1:17:21 PM	BCl3 MFC set to  0.000000
10/7/2011	1:17:21 PM	PHl3 MFC set to  0.000000
10/7/2011	1:17:21 PM	SiCl4 MFC set to  0.000000
10/7/2011	1:17:21 PM	Bypass solenoid MFC set to  0.000000
10/7/2011	1:17:21 PM	Tube furnace set to 0
10/7/2011	1:17:51 PM	Helium valve closed
10/7/2011	1:17:51 PM	H2 valve closed
10/7/2011	1:17:51 PM	BCl3 valve closed
10/7/2011	1:17:51 PM	PH3 valve closed
10/7/2011	1:17:51 PM	SiCl4 pre valve closed
10/7/2011	1:17:51 PM	SiCl4 post valve closed
10/7/2011	1:17:51 PM	Bypass valve closed
10/7/2011	1:17:51 PM	Bubbler valve closed
10/7/2011	1:17:51 PM	Main Vac valve opened
10/7/2011	1:17:51 PM	Helium MFC set to  0.000000
10/7/2011	1:17:51 PM	H2 MFC set to  0.000000
10/7/2011	1:17:51 PM	BCl3 MFC set to  0.000000
10/7/2011	1:17:51 PM	PHl3 MFC set to  0.000000
10/7/2011	1:17:51 PM	SiCl4 MFC set to  0.000000
10/7/2011	1:17:51 PM	Bypass solenoid MFC set to  0.000000
10/7/2011	1:17:51 PM	Tube furnace set to 0
10/7/2011	1:18:21 PM	H2 valve closed
10/7/2011	1:18:21 PM	BCl3 valve closed
10/7/2011	1:18:21 PM	PH3 valve closed
10/7/2011	1:18:21 PM	SiCl4 pre valve closed
10/7/2011	1:18:21 PM	SiCl4 post valve closed
10/7/2011	1:18:21 PM	Bypass valve closed
10/7/2011	1:18:21 PM	Bubbler valve closed
10/7/2011	1:18:21 PM	Helium valve opened
10/7/2011	1:18:21 PM	Main Vac valve opened
10/7/2011	1:18:21 PM	Helium MFC set to  20.000000
10/7/2011	1:18:21 PM	H2 MFC set to  0.000000
10/7/2011	1:18:21 PM	BCl3 MFC set to  0.000000
10/7/2011	1:18:21 PM	PHl3 MFC set to  0.000000
10/7/2011	1:18:21 PM	SiCl4 MFC set to  0.000000
10/7/2011	1:18:21 PM	Bypass solenoid MFC set to  0.000000
10/7/2011	1:18:21 PM	Tube furnace set to 0
10/7/2011	1:18:51 PM	Helium valve closed
10/7/2011	1:18:51 PM	H2 valve closed
10/7/2011	1:18:51 PM	BCl3 valve closed
10/7/2011	1:18:51 PM	PH3 valve closed
10/7/2011	1:18:51 PM	SiCl4 pre valve closed
10/7/2011	1:18:51 PM	SiCl4 post valve closed
10/7/2011	1:18:51 PM	Bypass valve closed
10/7/2011	1:18:51 PM	Bubbler valve closed
10/7/2011	1:18:51 PM	Main Vac valve opened
10/7/2011	1:18:51 PM	Helium MFC set to  0.000000
10/7/2011	1:18:51 PM	H2 MFC set to  0.000000
10/7/2011	1:18:51 PM	BCl3 MFC set to  0.000000
10/7/2011	1:18:51 PM	PHl3 MFC set to  0.000000
10/7/2011	1:18:51 PM	SiCl4 MFC set to  0.000000
10/7/2011	1:18:51 PM	Bypass solenoid MFC set to  0.000000
10/7/2011	1:18:51 PM	Tube furnace set to 0
10/7/2011	1:19:21 PM	H2 valve closed
10/7/2011	1:19:21 PM	BCl3 valve closed
10/7/2011	1:19:21 PM	PH3 valve closed
10/7/2011	1:19:21 PM	SiCl4 pre valve closed
10/7/2011	1:19:21 PM	SiCl4 post valve closed
10/7/2011	1:19:21 PM	Bypass valve closed
10/7/2011	1:19:21 PM	Bubbler valve closed
10/7/2011	1:19:21 PM	Helium valve opened
10/7/2011	1:19:21 PM	Main Vac valve opened
10/7/2011	1:19:21 PM	Helium MFC set to  20.000000
10/7/2011	1:19:22 PM	H2 MFC set to  0.000000
10/7/2011	1:19:22 PM	BCl3 MFC set to  0.000000
10/7/2011	1:19:22 PM	PHl3 MFC set to  0.000000
10/7/2011	1:19:22 PM	SiCl4 MFC set to  0.000000
10/7/2011	1:19:22 PM	Bypass solenoid MFC set to  0.000000
10/7/2011	1:19:22 PM	Tube furnace set to 0
10/7/2011	1:19:52 PM	Helium valve closed
10/7/2011	1:19:52 PM	H2 valve closed
10/7/2011	1:19:52 PM	BCl3 valve closed
10/7/2011	1:19:52 PM	PH3 valve closed
10/7/2011	1:19:52 PM	SiCl4 pre valve closed
10/7/2011	1:19:52 PM	SiCl4 post valve closed
10/7/2011	1:19:52 PM	Bypass valve closed
10/7/2011	1:19:52 PM	Bubbler valve closed
10/7/2011	1:19:52 PM	Main Vac valve opened
10/7/2011	1:19:52 PM	Helium MFC set to  0.000000
10/7/2011	1:19:52 PM	H2 MFC set to  0.000000
10/7/2011	1:19:52 PM	BCl3 MFC set to  0.000000
10/7/2011	1:19:52 PM	PHl3 MFC set to  0.000000
10/7/2011	1:19:52 PM	SiCl4 MFC set to  0.000000
10/7/2011	1:19:52 PM	Bypass solenoid MFC set to  0.000000
10/7/2011	1:19:52 PM	Tube furnace set to 0
10/7/2011	1:20:22 PM	H2 valve closed
10/7/2011	1:20:22 PM	BCl3 valve closed
10/7/2011	1:20:22 PM	PH3 valve closed
10/7/2011	1:20:22 PM	SiCl4 pre valve closed
10/7/2011	1:20:22 PM	SiCl4 post valve closed
10/7/2011	1:20:22 PM	Bypass valve closed
10/7/2011	1:20:22 PM	Bubbler valve closed
10/7/2011	1:20:22 PM	Helium valve opened
10/7/2011	1:20:22 PM	Main Vac valve opened
10/7/2011	1:20:22 PM	Helium MFC set to  20.000000
10/7/2011	1:20:22 PM	H2 MFC set to  0.000000
10/7/2011	1:20:22 PM	BCl3 MFC set to  0.000000
10/7/2011	1:20:22 PM	PHl3 MFC set to  0.000000
10/7/2011	1:20:22 PM	SiCl4 MFC set to  0.000000
10/7/2011	1:20:22 PM	Bypass solenoid MFC set to  0.000000
10/7/2011	1:20:22 PM	Tube furnace set to 0
10/7/2011	1:20:52 PM	Helium valve closed
10/7/2011	1:20:52 PM	H2 valve closed
10/7/2011	1:20:52 PM	BCl3 valve closed
10/7/2011	1:20:52 PM	PH3 valve closed
10/7/2011	1:20:52 PM	SiCl4 pre valve closed
10/7/2011	1:20:52 PM	SiCl4 post valve closed
10/7/2011	1:20:52 PM	Bypass valve closed
10/7/2011	1:20:52 PM	Bubbler valve closed
10/7/2011	1:20:52 PM	Main Vac valve opened
10/7/2011	1:20:52 PM	Helium MFC set to  0.000000
10/7/2011	1:20:52 PM	H2 MFC set to  0.000000
10/7/2011	1:20:52 PM	BCl3 MFC set to  0.000000
10/7/2011	1:20:52 PM	PHl3 MFC set to  0.000000
10/7/2011	1:20:52 PM	SiCl4 MFC set to  0.000000
10/7/2011	1:20:52 PM	Bypass solenoid MFC set to  0.000000
10/7/2011	1:20:52 PM	Tube furnace set to 0
10/7/2011	1:20:53 PM	Run finished at 1:20 PM
10/7/2011	1:20:53 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/7/2011	1:54:45 PM	Main Vac valve closed
10/7/2011	1:55:08 PM	Main Vac valve opened
10/7/2011	1:58:15 PM	Recipe started at 1:58 PM
10/7/2011	1:58:15 PM	Helium valve closed
10/7/2011	1:58:15 PM	H2 valve closed
10/7/2011	1:58:15 PM	BCl3 valve closed
10/7/2011	1:58:15 PM	PH3 valve closed
10/7/2011	1:58:15 PM	SiCl4 pre valve closed
10/7/2011	1:58:15 PM	SiCl4 post valve closed
10/7/2011	1:58:15 PM	Main Vac valve closed
10/7/2011	1:58:15 PM	Bypass valve closed
10/7/2011	1:58:15 PM	Bubbler valve closed
10/7/2011	1:58:15 PM	Helium MFC set to  0.000000
10/7/2011	1:58:15 PM	H2 MFC set to  0.000000
10/7/2011	1:58:15 PM	BCl3 MFC set to  0.000000
10/7/2011	1:58:15 PM	PHl3 MFC set to  0.000000
10/7/2011	1:58:15 PM	SiCl4 MFC set to  0.000000
10/7/2011	1:58:15 PM	Bypass solenoid MFC set to  0.000000
10/7/2011	1:58:15 PM	Tube furnace set to 0
10/7/2011	1:58:18 PM	Helium valve closed
10/7/2011	1:58:18 PM	BCl3 valve closed
10/7/2011	1:58:18 PM	PH3 valve closed
10/7/2011	1:58:18 PM	SiCl4 pre valve closed
10/7/2011	1:58:18 PM	SiCl4 post valve closed
10/7/2011	1:58:18 PM	Main Vac valve closed
10/7/2011	1:58:18 PM	Bypass valve closed
10/7/2011	1:58:18 PM	Bubbler valve closed
10/7/2011	1:58:18 PM	H2 valve opened
10/7/2011	1:58:18 PM	Helium MFC set to  0.000000
10/7/2011	1:58:18 PM	H2 MFC set to  500.000000
10/7/2011	1:58:18 PM	BCl3 MFC set to  0.000000
10/7/2011	1:58:18 PM	PHl3 MFC set to  0.000000
10/7/2011	1:58:18 PM	SiCl4 MFC set to  0.000000
10/7/2011	1:58:18 PM	Bypass solenoid MFC set to  0.000000
10/7/2011	1:58:18 PM	Tube furnace set to 0
10/7/2011	1:59:23 PM	Helium valve closed
10/7/2011	1:59:23 PM	BCl3 valve closed
10/7/2011	1:59:23 PM	PH3 valve closed
10/7/2011	1:59:23 PM	SiCl4 pre valve closed
10/7/2011	1:59:23 PM	SiCl4 post valve closed
10/7/2011	1:59:23 PM	Main Vac valve closed
10/7/2011	1:59:23 PM	Bypass valve closed
10/7/2011	1:59:23 PM	H2 valve opened
10/7/2011	1:59:23 PM	Bubbler valve opened
10/7/2011	1:59:23 PM	Helium MFC set to  0.000000
10/7/2011	1:59:23 PM	H2 MFC set to  500.000000
10/7/2011	1:59:23 PM	BCl3 MFC set to  0.000000
10/7/2011	1:59:23 PM	PHl3 MFC set to  0.000000
10/7/2011	1:59:23 PM	SiCl4 MFC set to  0.000000
10/7/2011	1:59:23 PM	Bypass solenoid MFC set to  0.000000
10/7/2011	1:59:24 PM	Tube furnace set to 0
10/7/2011	1:59:25 PM	Helium valve closed
10/7/2011	1:59:25 PM	BCl3 valve closed
10/7/2011	1:59:25 PM	PH3 valve closed
10/7/2011	1:59:25 PM	SiCl4 pre valve closed
10/7/2011	1:59:25 PM	SiCl4 post valve closed
10/7/2011	1:59:25 PM	Main Vac valve closed
10/7/2011	1:59:25 PM	Bypass valve closed
10/7/2011	1:59:25 PM	H2 valve opened
10/7/2011	1:59:25 PM	Bubbler valve opened
10/7/2011	1:59:25 PM	Helium MFC set to  0.000000
10/7/2011	1:59:25 PM	H2 MFC set to  500.000000
10/7/2011	1:59:25 PM	BCl3 MFC set to  0.000000
10/7/2011	1:59:25 PM	PHl3 MFC set to  0.000000
10/7/2011	1:59:25 PM	SiCl4 MFC set to  0.000000
10/7/2011	1:59:25 PM	Bypass solenoid MFC set to  0.000000
10/7/2011	1:59:25 PM	Tube furnace set to 1000
10/7/2011	2:19:25 PM	Helium valve closed
10/7/2011	2:19:25 PM	BCl3 valve closed
10/7/2011	2:19:25 PM	PH3 valve closed
10/7/2011	2:19:25 PM	Main Vac valve closed
10/7/2011	2:19:25 PM	Bypass valve closed
10/7/2011	2:19:25 PM	H2 valve opened
10/7/2011	2:19:25 PM	SiCl4 pre valve opened
10/7/2011	2:19:25 PM	SiCl4 post valve opened
10/7/2011	2:19:25 PM	Bubbler valve opened
10/7/2011	2:19:25 PM	Helium MFC set to  0.000000
10/7/2011	2:19:25 PM	H2 MFC set to  500.000000
10/7/2011	2:19:25 PM	BCl3 MFC set to  0.000000
10/7/2011	2:19:25 PM	PHl3 MFC set to  0.000000
10/7/2011	2:19:25 PM	SiCl4 MFC set to  50.000000
10/7/2011	2:19:25 PM	Bypass solenoid MFC set to  0.000000
10/7/2011	2:19:25 PM	Tube furnace set to 1000
10/7/2011	2:39:25 PM	Helium valve closed
10/7/2011	2:39:25 PM	BCl3 valve closed
10/7/2011	2:39:25 PM	PH3 valve closed
10/7/2011	2:39:25 PM	SiCl4 pre valve closed
10/7/2011	2:39:25 PM	SiCl4 post valve closed
10/7/2011	2:39:25 PM	Main Vac valve closed
10/7/2011	2:39:25 PM	Bypass valve closed
10/7/2011	2:39:25 PM	H2 valve opened
10/7/2011	2:39:25 PM	Bubbler valve opened
10/7/2011	2:39:25 PM	Helium MFC set to  0.000000
10/7/2011	2:39:25 PM	H2 MFC set to  500.000000
10/7/2011	2:39:25 PM	BCl3 MFC set to  0.000000
10/7/2011	2:39:25 PM	PHl3 MFC set to  0.000000
10/7/2011	2:39:25 PM	SiCl4 MFC set to  0.000000
10/7/2011	2:39:25 PM	Bypass solenoid MFC set to  0.000000
10/7/2011	2:39:25 PM	Tube furnace set to 950
10/7/2011	2:41:35 PM	Helium valve closed
10/7/2011	2:41:35 PM	BCl3 valve closed
10/7/2011	2:41:35 PM	PH3 valve closed
10/7/2011	2:41:35 PM	SiCl4 pre valve closed
10/7/2011	2:41:35 PM	SiCl4 post valve closed
10/7/2011	2:41:35 PM	Main Vac valve closed
10/7/2011	2:41:35 PM	Bypass valve closed
10/7/2011	2:41:35 PM	H2 valve opened
10/7/2011	2:41:35 PM	Bubbler valve opened
10/7/2011	2:41:35 PM	Helium MFC set to  0.000000
10/7/2011	2:41:35 PM	H2 MFC set to  500.000000
10/7/2011	2:41:35 PM	BCl3 MFC set to  0.000000
10/7/2011	2:41:35 PM	PHl3 MFC set to  0.000000
10/7/2011	2:41:35 PM	SiCl4 MFC set to  0.000000
10/7/2011	2:41:35 PM	Bypass solenoid MFC set to  0.000000
10/7/2011	2:41:35 PM	Tube furnace set to 850
10/7/2011	2:41:37 PM	H2 valve closed
10/7/2011	2:41:37 PM	BCl3 valve closed
10/7/2011	2:41:37 PM	PH3 valve closed
10/7/2011	2:41:37 PM	SiCl4 pre valve closed
10/7/2011	2:41:37 PM	SiCl4 post valve closed
10/7/2011	2:41:37 PM	Main Vac valve closed
10/7/2011	2:41:37 PM	Bypass valve closed
10/7/2011	2:41:37 PM	Helium valve opened
10/7/2011	2:41:37 PM	Bubbler valve opened
10/7/2011	2:41:37 PM	Helium MFC set to  500.000000
10/7/2011	2:41:37 PM	H2 MFC set to  0.000000
10/7/2011	2:41:37 PM	BCl3 MFC set to  0.000000
10/7/2011	2:41:37 PM	PHl3 MFC set to  0.000000
10/7/2011	2:41:37 PM	SiCl4 MFC set to  0.000000
10/7/2011	2:41:37 PM	Bypass solenoid MFC set to  0.000000
10/7/2011	2:41:37 PM	Tube furnace set to 0
10/7/2011	2:57:31 PM	Helium valve closed
10/7/2011	2:57:31 PM	H2 valve closed
10/7/2011	2:57:31 PM	BCl3 valve closed
10/7/2011	2:57:31 PM	PH3 valve closed
10/7/2011	2:57:31 PM	SiCl4 pre valve closed
10/7/2011	2:57:31 PM	SiCl4 post valve closed
10/7/2011	2:57:31 PM	Main Vac valve closed
10/7/2011	2:57:31 PM	Bypass valve closed
10/7/2011	2:57:31 PM	Bubbler valve closed
10/7/2011	2:57:31 PM	Helium MFC set to  0.000000
10/7/2011	2:57:31 PM	H2 MFC set to  0.000000
10/7/2011	2:57:31 PM	BCl3 MFC set to  0.000000
10/7/2011	2:57:31 PM	PHl3 MFC set to  0.000000
10/7/2011	2:57:31 PM	SiCl4 MFC set to  0.000000
10/7/2011	2:57:31 PM	Bypass solenoid MFC set to  0.000000
10/7/2011	2:57:31 PM	Tube furnace set to 0
10/7/2011	2:57:32 PM	Run finished at 2:57 PM
10/7/2011	3:04:35 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/7/2011	3:04:36 PM	Recipe started at 3:04 PM
10/7/2011	3:04:36 PM	Helium valve closed
10/7/2011	3:04:36 PM	H2 valve closed
10/7/2011	3:04:36 PM	BCl3 valve closed
10/7/2011	3:04:36 PM	PH3 valve closed
10/7/2011	3:04:36 PM	SiCl4 pre valve closed
10/7/2011	3:04:36 PM	SiCl4 post valve closed
10/7/2011	3:04:36 PM	Main Vac valve closed
10/7/2011	3:04:36 PM	Bubbler valve closed
10/7/2011	3:04:36 PM	Bypass valve opened
10/7/2011	3:04:36 PM	Helium MFC set to  0.000000
10/7/2011	3:04:36 PM	H2 MFC set to  0.000000
10/7/2011	3:04:36 PM	BCl3 MFC set to  0.000000
10/7/2011	3:04:36 PM	PHl3 MFC set to  0.000000
10/7/2011	3:04:36 PM	SiCl4 MFC set to  0.000000
10/7/2011	3:04:36 PM	Bypass solenoid MFC set to  0.000000
10/7/2011	3:04:36 PM	Tube furnace set to 0
10/7/2011	3:05:45 PM	Helium valve closed
10/7/2011	3:05:45 PM	H2 valve closed
10/7/2011	3:05:45 PM	BCl3 valve closed
10/7/2011	3:05:45 PM	PH3 valve closed
10/7/2011	3:05:45 PM	SiCl4 pre valve closed
10/7/2011	3:05:45 PM	SiCl4 post valve closed
10/7/2011	3:05:45 PM	Main Vac valve closed
10/7/2011	3:05:45 PM	Bubbler valve closed
10/7/2011	3:05:45 PM	Bypass valve opened
10/7/2011	3:05:45 PM	Helium MFC set to  0.000000
10/7/2011	3:05:45 PM	H2 MFC set to  0.000000
10/7/2011	3:05:45 PM	BCl3 MFC set to  0.000000
10/7/2011	3:05:45 PM	PHl3 MFC set to  0.000000
10/7/2011	3:05:45 PM	SiCl4 MFC set to  0.000000
10/7/2011	3:05:45 PM	Bypass solenoid MFC set to  0.000000
10/7/2011	3:05:45 PM	Tube furnace set to 0
10/7/2011	3:06:45 PM	Helium valve closed
10/7/2011	3:06:45 PM	H2 valve closed
10/7/2011	3:06:45 PM	BCl3 valve closed
10/7/2011	3:06:45 PM	PH3 valve closed
10/7/2011	3:06:45 PM	SiCl4 pre valve closed
10/7/2011	3:06:45 PM	SiCl4 post valve closed
10/7/2011	3:06:45 PM	Bypass valve closed
10/7/2011	3:06:45 PM	Bubbler valve closed
10/7/2011	3:06:45 PM	Main Vac valve opened
10/7/2011	3:06:45 PM	Helium MFC set to  0.000000
10/7/2011	3:06:45 PM	H2 MFC set to  0.000000
10/7/2011	3:06:45 PM	BCl3 MFC set to  0.000000
10/7/2011	3:06:45 PM	PHl3 MFC set to  0.000000
10/7/2011	3:06:45 PM	SiCl4 MFC set to  0.000000
10/7/2011	3:06:45 PM	Bypass solenoid MFC set to  0.000000
10/7/2011	3:06:45 PM	Tube furnace set to 0
10/7/2011	3:06:46 PM	Run finished at 3:06 PM
10/7/2011	3:06:46 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/7/2011	3:07:39 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
10/7/2011	3:07:39 PM	Recipe started at 3:07 PM
10/7/2011	3:07:39 PM	Helium valve closed
10/7/2011	3:07:39 PM	H2 valve closed
10/7/2011	3:07:39 PM	BCl3 valve closed
10/7/2011	3:07:39 PM	PH3 valve closed
10/7/2011	3:07:39 PM	SiCl4 pre valve closed
10/7/2011	3:07:39 PM	SiCl4 post valve closed
10/7/2011	3:07:39 PM	Main Vac valve closed
10/7/2011	3:07:39 PM	Bypass valve closed
10/7/2011	3:07:39 PM	Bubbler valve closed
10/7/2011	3:07:39 PM	Helium MFC set to  0.000000
10/7/2011	3:07:39 PM	H2 MFC set to  0.000000
10/7/2011	3:07:39 PM	BCl3 MFC set to  0.000000
10/7/2011	3:07:39 PM	PHl3 MFC set to  0.000000
10/7/2011	3:07:39 PM	SiCl4 MFC set to  0.000000
10/7/2011	3:07:39 PM	Bypass solenoid MFC set to  0.000000
10/7/2011	3:07:39 PM	Tube furnace set to 0
10/7/2011	3:07:40 PM	Run finished at 3:07 PM
10/7/2011	3:07:40 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
10/7/2011	3:07:46 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/7/2011	3:07:46 PM	Recipe started at 3:07 PM
10/7/2011	3:07:46 PM	Helium valve closed
10/7/2011	3:07:46 PM	H2 valve closed
10/7/2011	3:07:46 PM	BCl3 valve closed
10/7/2011	3:07:46 PM	PH3 valve closed
10/7/2011	3:07:46 PM	SiCl4 pre valve closed
10/7/2011	3:07:46 PM	SiCl4 post valve closed
10/7/2011	3:07:46 PM	Main Vac valve closed
10/7/2011	3:07:46 PM	Bubbler valve closed
10/7/2011	3:07:46 PM	Bypass valve opened
10/7/2011	3:07:46 PM	Helium MFC set to  0.000000
10/7/2011	3:07:46 PM	H2 MFC set to  0.000000
10/7/2011	3:07:46 PM	BCl3 MFC set to  0.000000
10/7/2011	3:07:46 PM	PHl3 MFC set to  0.000000
10/7/2011	3:07:46 PM	SiCl4 MFC set to  0.000000
10/7/2011	3:07:46 PM	Bypass solenoid MFC set to  0.000000
10/7/2011	3:07:47 PM	Tube furnace set to 0
10/7/2011	3:07:47 PM	Helium valve closed
10/7/2011	3:07:47 PM	H2 valve closed
10/7/2011	3:07:47 PM	BCl3 valve closed
10/7/2011	3:07:47 PM	PH3 valve closed
10/7/2011	3:07:47 PM	SiCl4 pre valve closed
10/7/2011	3:07:47 PM	SiCl4 post valve closed
10/7/2011	3:07:47 PM	Main Vac valve closed
10/7/2011	3:07:47 PM	Bubbler valve closed
10/7/2011	3:07:47 PM	Bypass valve opened
10/7/2011	3:07:47 PM	Helium MFC set to  0.000000
10/7/2011	3:07:47 PM	H2 MFC set to  0.000000
10/7/2011	3:07:47 PM	BCl3 MFC set to  0.000000
10/7/2011	3:07:47 PM	PHl3 MFC set to  0.000000
10/7/2011	3:07:47 PM	SiCl4 MFC set to  0.000000
10/7/2011	3:07:47 PM	Bypass solenoid MFC set to  0.000000
10/7/2011	3:07:47 PM	Tube furnace set to 0
10/7/2011	3:07:49 PM	Helium valve closed
10/7/2011	3:07:49 PM	H2 valve closed
10/7/2011	3:07:49 PM	BCl3 valve closed
10/7/2011	3:07:49 PM	PH3 valve closed
10/7/2011	3:07:49 PM	SiCl4 pre valve closed
10/7/2011	3:07:49 PM	SiCl4 post valve closed
10/7/2011	3:07:49 PM	Bypass valve closed
10/7/2011	3:07:49 PM	Bubbler valve closed
10/7/2011	3:07:49 PM	Main Vac valve opened
10/7/2011	3:07:49 PM	Helium MFC set to  0.000000
10/7/2011	3:07:49 PM	H2 MFC set to  0.000000
10/7/2011	3:07:49 PM	BCl3 MFC set to  0.000000
10/7/2011	3:07:49 PM	PHl3 MFC set to  0.000000
10/7/2011	3:07:49 PM	SiCl4 MFC set to  0.000000
10/7/2011	3:07:49 PM	Bypass solenoid MFC set to  0.000000
10/7/2011	3:07:49 PM	Tube furnace set to 0
10/7/2011	3:07:50 PM	Run finished at 3:07 PM
10/7/2011	3:07:50 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/7/2011	4:34:53 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/7/2011	4:35:05 PM	Recipe started at 4:34 PM
10/7/2011	4:35:05 PM	Helium valve closed
10/7/2011	4:35:05 PM	H2 valve closed
10/7/2011	4:35:05 PM	BCl3 valve closed
10/7/2011	4:35:05 PM	PH3 valve closed
10/7/2011	4:35:05 PM	SiCl4 pre valve closed
10/7/2011	4:35:05 PM	SiCl4 post valve closed
10/7/2011	4:35:05 PM	Main Vac valve closed
10/7/2011	4:35:05 PM	Bubbler valve closed
10/7/2011	4:35:05 PM	Bypass valve opened
10/7/2011	4:35:06 PM	Helium MFC set to  0.000000
10/7/2011	4:35:06 PM	H2 MFC set to  0.000000
10/7/2011	4:35:06 PM	BCl3 MFC set to  0.000000
10/7/2011	4:35:06 PM	PHl3 MFC set to  0.000000
10/7/2011	4:35:06 PM	SiCl4 MFC set to  0.000000
10/7/2011	4:35:06 PM	Bypass solenoid MFC set to  0.000000
10/7/2011	4:35:06 PM	Tube furnace set to 0
10/7/2011	4:35:06 PM	Helium valve closed
10/7/2011	4:35:06 PM	H2 valve closed
10/7/2011	4:35:06 PM	BCl3 valve closed
10/7/2011	4:35:06 PM	PH3 valve closed
10/7/2011	4:35:06 PM	SiCl4 pre valve closed
10/7/2011	4:35:06 PM	SiCl4 post valve closed
10/7/2011	4:35:06 PM	Main Vac valve closed
10/7/2011	4:35:06 PM	Bubbler valve closed
10/7/2011	4:35:06 PM	Bypass valve opened
10/7/2011	4:35:06 PM	Helium MFC set to  0.000000
10/7/2011	4:35:06 PM	H2 MFC set to  0.000000
10/7/2011	4:35:06 PM	BCl3 MFC set to  0.000000
10/7/2011	4:35:06 PM	PHl3 MFC set to  0.000000
10/7/2011	4:35:06 PM	SiCl4 MFC set to  0.000000
10/7/2011	4:35:06 PM	Bypass solenoid MFC set to  0.000000
10/7/2011	4:35:06 PM	Tube furnace set to 0
10/7/2011	4:35:06 PM	Helium valve closed
10/7/2011	4:35:06 PM	H2 valve closed
10/7/2011	4:35:06 PM	BCl3 valve closed
10/7/2011	4:35:06 PM	PH3 valve closed
10/7/2011	4:35:06 PM	SiCl4 pre valve closed
10/7/2011	4:35:06 PM	SiCl4 post valve closed
10/7/2011	4:35:06 PM	Bypass valve closed
10/7/2011	4:35:06 PM	Bubbler valve closed
10/7/2011	4:35:06 PM	Main Vac valve opened
10/7/2011	4:35:06 PM	Helium MFC set to  0.000000
10/7/2011	4:35:06 PM	H2 MFC set to  0.000000
10/7/2011	4:35:06 PM	BCl3 MFC set to  0.000000
10/7/2011	4:35:06 PM	PHl3 MFC set to  0.000000
10/7/2011	4:35:06 PM	SiCl4 MFC set to  0.000000
10/7/2011	4:35:06 PM	Bypass solenoid MFC set to  0.000000
10/7/2011	4:35:07 PM	Tube furnace set to 0
10/7/2011	4:35:37 PM	H2 valve closed
10/7/2011	4:35:37 PM	BCl3 valve closed
10/7/2011	4:35:37 PM	PH3 valve closed
10/7/2011	4:35:37 PM	SiCl4 pre valve closed
10/7/2011	4:35:37 PM	SiCl4 post valve closed
10/7/2011	4:35:37 PM	Bypass valve closed
10/7/2011	4:35:37 PM	Bubbler valve closed
10/7/2011	4:35:37 PM	Helium valve opened
10/7/2011	4:35:37 PM	Main Vac valve opened
10/7/2011	4:35:37 PM	Helium MFC set to  20.000000
10/7/2011	4:35:37 PM	H2 MFC set to  0.000000
10/7/2011	4:35:37 PM	BCl3 MFC set to  0.000000
10/7/2011	4:35:37 PM	PHl3 MFC set to  0.000000
10/7/2011	4:35:37 PM	SiCl4 MFC set to  0.000000
10/7/2011	4:35:37 PM	Bypass solenoid MFC set to  0.000000
10/7/2011	4:35:37 PM	Tube furnace set to 0
10/7/2011	4:36:07 PM	Helium valve closed
10/7/2011	4:36:07 PM	H2 valve closed
10/7/2011	4:36:07 PM	BCl3 valve closed
10/7/2011	4:36:07 PM	PH3 valve closed
10/7/2011	4:36:07 PM	SiCl4 pre valve closed
10/7/2011	4:36:07 PM	SiCl4 post valve closed
10/7/2011	4:36:07 PM	Bypass valve closed
10/7/2011	4:36:07 PM	Bubbler valve closed
10/7/2011	4:36:07 PM	Main Vac valve opened
10/7/2011	4:36:07 PM	Helium MFC set to  0.000000
10/7/2011	4:36:07 PM	H2 MFC set to  0.000000
10/7/2011	4:36:07 PM	BCl3 MFC set to  0.000000
10/7/2011	4:36:07 PM	PHl3 MFC set to  0.000000
10/7/2011	4:36:07 PM	SiCl4 MFC set to  0.000000
10/7/2011	4:36:07 PM	Bypass solenoid MFC set to  0.000000
10/7/2011	4:36:07 PM	Tube furnace set to 0
10/7/2011	4:36:37 PM	H2 valve closed
10/7/2011	4:36:37 PM	BCl3 valve closed
10/7/2011	4:36:37 PM	PH3 valve closed
10/7/2011	4:36:37 PM	SiCl4 pre valve closed
10/7/2011	4:36:37 PM	SiCl4 post valve closed
10/7/2011	4:36:37 PM	Bypass valve closed
10/7/2011	4:36:37 PM	Bubbler valve closed
10/7/2011	4:36:37 PM	Helium valve opened
10/7/2011	4:36:37 PM	Main Vac valve opened
10/7/2011	4:36:37 PM	Helium MFC set to  20.000000
10/7/2011	4:36:37 PM	H2 MFC set to  0.000000
10/7/2011	4:36:37 PM	BCl3 MFC set to  0.000000
10/7/2011	4:36:37 PM	PHl3 MFC set to  0.000000
10/7/2011	4:36:37 PM	SiCl4 MFC set to  0.000000
10/7/2011	4:36:37 PM	Bypass solenoid MFC set to  0.000000
10/7/2011	4:36:37 PM	Tube furnace set to 0
10/7/2011	4:37:07 PM	Helium valve closed
10/7/2011	4:37:07 PM	H2 valve closed
10/7/2011	4:37:07 PM	BCl3 valve closed
10/7/2011	4:37:07 PM	PH3 valve closed
10/7/2011	4:37:07 PM	SiCl4 pre valve closed
10/7/2011	4:37:07 PM	SiCl4 post valve closed
10/7/2011	4:37:07 PM	Bypass valve closed
10/7/2011	4:37:07 PM	Bubbler valve closed
10/7/2011	4:37:07 PM	Main Vac valve opened
10/7/2011	4:37:07 PM	Helium MFC set to  0.000000
10/7/2011	4:37:07 PM	H2 MFC set to  0.000000
10/7/2011	4:37:07 PM	BCl3 MFC set to  0.000000
10/7/2011	4:37:07 PM	PHl3 MFC set to  0.000000
10/7/2011	4:37:07 PM	SiCl4 MFC set to  0.000000
10/7/2011	4:37:07 PM	Bypass solenoid MFC set to  0.000000
10/7/2011	4:37:07 PM	Tube furnace set to 0
10/7/2011	4:37:37 PM	H2 valve closed
10/7/2011	4:37:37 PM	BCl3 valve closed
10/7/2011	4:37:37 PM	PH3 valve closed
10/7/2011	4:37:37 PM	SiCl4 pre valve closed
10/7/2011	4:37:37 PM	SiCl4 post valve closed
10/7/2011	4:37:37 PM	Bypass valve closed
10/7/2011	4:37:37 PM	Bubbler valve closed
10/7/2011	4:37:37 PM	Helium valve opened
10/7/2011	4:37:37 PM	Main Vac valve opened
10/7/2011	4:37:37 PM	Helium MFC set to  20.000000
10/7/2011	4:37:37 PM	H2 MFC set to  0.000000
10/7/2011	4:37:37 PM	BCl3 MFC set to  0.000000
10/7/2011	4:37:37 PM	PHl3 MFC set to  0.000000
10/7/2011	4:37:37 PM	SiCl4 MFC set to  0.000000
10/7/2011	4:37:37 PM	Bypass solenoid MFC set to  0.000000
10/7/2011	4:37:38 PM	Tube furnace set to 0
10/7/2011	4:38:08 PM	Helium valve closed
10/7/2011	4:38:08 PM	H2 valve closed
10/7/2011	4:38:08 PM	BCl3 valve closed
10/7/2011	4:38:08 PM	PH3 valve closed
10/7/2011	4:38:08 PM	SiCl4 pre valve closed
10/7/2011	4:38:08 PM	SiCl4 post valve closed
10/7/2011	4:38:08 PM	Bypass valve closed
10/7/2011	4:38:08 PM	Bubbler valve closed
10/7/2011	4:38:08 PM	Main Vac valve opened
10/7/2011	4:38:08 PM	Helium MFC set to  0.000000
10/7/2011	4:38:08 PM	H2 MFC set to  0.000000
10/7/2011	4:38:08 PM	BCl3 MFC set to  0.000000
10/7/2011	4:38:08 PM	PHl3 MFC set to  0.000000
10/7/2011	4:38:08 PM	SiCl4 MFC set to  0.000000
10/7/2011	4:38:08 PM	Bypass solenoid MFC set to  0.000000
10/7/2011	4:38:08 PM	Tube furnace set to 0
10/7/2011	4:38:38 PM	H2 valve closed
10/7/2011	4:38:38 PM	BCl3 valve closed
10/7/2011	4:38:38 PM	PH3 valve closed
10/7/2011	4:38:38 PM	SiCl4 pre valve closed
10/7/2011	4:38:38 PM	SiCl4 post valve closed
10/7/2011	4:38:38 PM	Bypass valve closed
10/7/2011	4:38:38 PM	Bubbler valve closed
10/7/2011	4:38:38 PM	Helium valve opened
10/7/2011	4:38:38 PM	Main Vac valve opened
10/7/2011	4:38:38 PM	Helium MFC set to  20.000000
10/7/2011	4:38:38 PM	H2 MFC set to  0.000000
10/7/2011	4:38:38 PM	BCl3 MFC set to  0.000000
10/7/2011	4:38:38 PM	PHl3 MFC set to  0.000000
10/7/2011	4:38:38 PM	SiCl4 MFC set to  0.000000
10/7/2011	4:38:38 PM	Bypass solenoid MFC set to  0.000000
10/7/2011	4:38:38 PM	Tube furnace set to 0
10/7/2011	4:39:08 PM	Helium valve closed
10/7/2011	4:39:08 PM	H2 valve closed
10/7/2011	4:39:08 PM	BCl3 valve closed
10/7/2011	4:39:08 PM	PH3 valve closed
10/7/2011	4:39:08 PM	SiCl4 pre valve closed
10/7/2011	4:39:08 PM	SiCl4 post valve closed
10/7/2011	4:39:08 PM	Bypass valve closed
10/7/2011	4:39:08 PM	Bubbler valve closed
10/7/2011	4:39:08 PM	Main Vac valve opened
10/7/2011	4:39:08 PM	Helium MFC set to  0.000000
10/7/2011	4:39:08 PM	H2 MFC set to  0.000000
10/7/2011	4:39:08 PM	BCl3 MFC set to  0.000000
10/7/2011	4:39:08 PM	PHl3 MFC set to  0.000000
10/7/2011	4:39:08 PM	SiCl4 MFC set to  0.000000
10/7/2011	4:39:08 PM	Bypass solenoid MFC set to  0.000000
10/7/2011	4:39:08 PM	Tube furnace set to 0
10/7/2011	4:39:38 PM	H2 valve closed
10/7/2011	4:39:38 PM	BCl3 valve closed
10/7/2011	4:39:38 PM	PH3 valve closed
10/7/2011	4:39:38 PM	SiCl4 pre valve closed
10/7/2011	4:39:38 PM	SiCl4 post valve closed
10/7/2011	4:39:38 PM	Bypass valve closed
10/7/2011	4:39:38 PM	Bubbler valve closed
10/7/2011	4:39:38 PM	Helium valve opened
10/7/2011	4:39:38 PM	Main Vac valve opened
10/7/2011	4:39:38 PM	Helium MFC set to  20.000000
10/7/2011	4:39:38 PM	H2 MFC set to  0.000000
10/7/2011	4:39:38 PM	BCl3 MFC set to  0.000000
10/7/2011	4:39:38 PM	PHl3 MFC set to  0.000000
10/7/2011	4:39:38 PM	SiCl4 MFC set to  0.000000
10/7/2011	4:39:38 PM	Bypass solenoid MFC set to  0.000000
10/7/2011	4:39:38 PM	Tube furnace set to 0
10/7/2011	4:40:08 PM	Helium valve closed
10/7/2011	4:40:08 PM	H2 valve closed
10/7/2011	4:40:08 PM	BCl3 valve closed
10/7/2011	4:40:08 PM	PH3 valve closed
10/7/2011	4:40:08 PM	SiCl4 pre valve closed
10/7/2011	4:40:08 PM	SiCl4 post valve closed
10/7/2011	4:40:08 PM	Bypass valve closed
10/7/2011	4:40:08 PM	Bubbler valve closed
10/7/2011	4:40:08 PM	Main Vac valve opened
10/7/2011	4:40:08 PM	Helium MFC set to  0.000000
10/7/2011	4:40:08 PM	H2 MFC set to  0.000000
10/7/2011	4:40:08 PM	BCl3 MFC set to  0.000000
10/7/2011	4:40:08 PM	PHl3 MFC set to  0.000000
10/7/2011	4:40:08 PM	SiCl4 MFC set to  0.000000
10/7/2011	4:40:08 PM	Bypass solenoid MFC set to  0.000000
10/7/2011	4:40:09 PM	Tube furnace set to 0
10/7/2011	4:40:39 PM	H2 valve closed
10/7/2011	4:40:39 PM	BCl3 valve closed
10/7/2011	4:40:39 PM	PH3 valve closed
10/7/2011	4:40:39 PM	SiCl4 pre valve closed
10/7/2011	4:40:39 PM	SiCl4 post valve closed
10/7/2011	4:40:39 PM	Bypass valve closed
10/7/2011	4:40:39 PM	Bubbler valve closed
10/7/2011	4:40:39 PM	Helium valve opened
10/7/2011	4:40:39 PM	Main Vac valve opened
10/7/2011	4:40:39 PM	Helium MFC set to  20.000000
10/7/2011	4:40:39 PM	H2 MFC set to  0.000000
10/7/2011	4:40:39 PM	BCl3 MFC set to  0.000000
10/7/2011	4:40:39 PM	PHl3 MFC set to  0.000000
10/7/2011	4:40:39 PM	SiCl4 MFC set to  0.000000
10/7/2011	4:40:39 PM	Bypass solenoid MFC set to  0.000000
10/7/2011	4:40:39 PM	Tube furnace set to 0
10/7/2011	4:41:09 PM	Helium valve closed
10/7/2011	4:41:09 PM	H2 valve closed
10/7/2011	4:41:09 PM	BCl3 valve closed
10/7/2011	4:41:09 PM	PH3 valve closed
10/7/2011	4:41:09 PM	SiCl4 pre valve closed
10/7/2011	4:41:09 PM	SiCl4 post valve closed
10/7/2011	4:41:09 PM	Bypass valve closed
10/7/2011	4:41:09 PM	Bubbler valve closed
10/7/2011	4:41:09 PM	Main Vac valve opened
10/7/2011	4:41:09 PM	Helium MFC set to  0.000000
10/7/2011	4:41:09 PM	H2 MFC set to  0.000000
10/7/2011	4:41:09 PM	BCl3 MFC set to  0.000000
10/7/2011	4:41:09 PM	PHl3 MFC set to  0.000000
10/7/2011	4:41:09 PM	SiCl4 MFC set to  0.000000
10/7/2011	4:41:09 PM	Bypass solenoid MFC set to  0.000000
10/7/2011	4:41:09 PM	Tube furnace set to 0
10/7/2011	4:41:39 PM	H2 valve closed
10/7/2011	4:41:39 PM	BCl3 valve closed
10/7/2011	4:41:39 PM	PH3 valve closed
10/7/2011	4:41:39 PM	SiCl4 pre valve closed
10/7/2011	4:41:39 PM	SiCl4 post valve closed
10/7/2011	4:41:39 PM	Bypass valve closed
10/7/2011	4:41:39 PM	Bubbler valve closed
10/7/2011	4:41:39 PM	Helium valve opened
10/7/2011	4:41:39 PM	Main Vac valve opened
10/7/2011	4:41:39 PM	Helium MFC set to  20.000000
10/7/2011	4:41:39 PM	H2 MFC set to  0.000000
10/7/2011	4:41:39 PM	BCl3 MFC set to  0.000000
10/7/2011	4:41:39 PM	PHl3 MFC set to  0.000000
10/7/2011	4:41:39 PM	SiCl4 MFC set to  0.000000
10/7/2011	4:41:39 PM	Bypass solenoid MFC set to  0.000000
10/7/2011	4:41:39 PM	Tube furnace set to 0
10/7/2011	4:42:09 PM	Helium valve closed
10/7/2011	4:42:09 PM	H2 valve closed
10/7/2011	4:42:09 PM	BCl3 valve closed
10/7/2011	4:42:09 PM	PH3 valve closed
10/7/2011	4:42:09 PM	SiCl4 pre valve closed
10/7/2011	4:42:09 PM	SiCl4 post valve closed
10/7/2011	4:42:09 PM	Bypass valve closed
10/7/2011	4:42:09 PM	Bubbler valve closed
10/7/2011	4:42:09 PM	Main Vac valve opened
10/7/2011	4:42:09 PM	Helium MFC set to  0.000000
10/7/2011	4:42:09 PM	H2 MFC set to  0.000000
10/7/2011	4:42:09 PM	BCl3 MFC set to  0.000000
10/7/2011	4:42:09 PM	PHl3 MFC set to  0.000000
10/7/2011	4:42:09 PM	SiCl4 MFC set to  0.000000
10/7/2011	4:42:09 PM	Bypass solenoid MFC set to  0.000000
10/7/2011	4:42:09 PM	Tube furnace set to 0
10/7/2011	4:42:39 PM	H2 valve closed
10/7/2011	4:42:39 PM	BCl3 valve closed
10/7/2011	4:42:39 PM	PH3 valve closed
10/7/2011	4:42:39 PM	SiCl4 pre valve closed
10/7/2011	4:42:39 PM	SiCl4 post valve closed
10/7/2011	4:42:39 PM	Bypass valve closed
10/7/2011	4:42:39 PM	Bubbler valve closed
10/7/2011	4:42:39 PM	Helium valve opened
10/7/2011	4:42:39 PM	Main Vac valve opened
10/7/2011	4:42:39 PM	Helium MFC set to  20.000000
10/7/2011	4:42:39 PM	H2 MFC set to  0.000000
10/7/2011	4:42:40 PM	BCl3 MFC set to  0.000000
10/7/2011	4:42:40 PM	PHl3 MFC set to  0.000000
10/7/2011	4:42:40 PM	SiCl4 MFC set to  0.000000
10/7/2011	4:42:40 PM	Bypass solenoid MFC set to  0.000000
10/7/2011	4:42:40 PM	Tube furnace set to 0
10/7/2011	4:43:10 PM	Helium valve closed
10/7/2011	4:43:10 PM	H2 valve closed
10/7/2011	4:43:10 PM	BCl3 valve closed
10/7/2011	4:43:10 PM	PH3 valve closed
10/7/2011	4:43:10 PM	SiCl4 pre valve closed
10/7/2011	4:43:10 PM	SiCl4 post valve closed
10/7/2011	4:43:10 PM	Bypass valve closed
10/7/2011	4:43:10 PM	Bubbler valve closed
10/7/2011	4:43:10 PM	Main Vac valve opened
10/7/2011	4:43:10 PM	Helium MFC set to  0.000000
10/7/2011	4:43:10 PM	H2 MFC set to  0.000000
10/7/2011	4:43:10 PM	BCl3 MFC set to  0.000000
10/7/2011	4:43:10 PM	PHl3 MFC set to  0.000000
10/7/2011	4:43:10 PM	SiCl4 MFC set to  0.000000
10/7/2011	4:43:10 PM	Bypass solenoid MFC set to  0.000000
10/7/2011	4:43:10 PM	Tube furnace set to 0
10/7/2011	4:43:40 PM	H2 valve closed
10/7/2011	4:43:40 PM	BCl3 valve closed
10/7/2011	4:43:40 PM	PH3 valve closed
10/7/2011	4:43:40 PM	SiCl4 pre valve closed
10/7/2011	4:43:40 PM	SiCl4 post valve closed
10/7/2011	4:43:40 PM	Bypass valve closed
10/7/2011	4:43:40 PM	Bubbler valve closed
10/7/2011	4:43:40 PM	Helium valve opened
10/7/2011	4:43:40 PM	Main Vac valve opened
10/7/2011	4:43:40 PM	Helium MFC set to  20.000000
10/7/2011	4:43:40 PM	H2 MFC set to  0.000000
10/7/2011	4:43:40 PM	BCl3 MFC set to  0.000000
10/7/2011	4:43:40 PM	PHl3 MFC set to  0.000000
10/7/2011	4:43:40 PM	SiCl4 MFC set to  0.000000
10/7/2011	4:43:40 PM	Bypass solenoid MFC set to  0.000000
10/7/2011	4:43:40 PM	Tube furnace set to 0
10/7/2011	4:44:10 PM	Helium valve closed
10/7/2011	4:44:10 PM	H2 valve closed
10/7/2011	4:44:10 PM	BCl3 valve closed
10/7/2011	4:44:10 PM	PH3 valve closed
10/7/2011	4:44:10 PM	SiCl4 pre valve closed
10/7/2011	4:44:10 PM	SiCl4 post valve closed
10/7/2011	4:44:10 PM	Bypass valve closed
10/7/2011	4:44:10 PM	Bubbler valve closed
10/7/2011	4:44:10 PM	Main Vac valve opened
10/7/2011	4:44:10 PM	Helium MFC set to  0.000000
10/7/2011	4:44:10 PM	H2 MFC set to  0.000000
10/7/2011	4:44:10 PM	BCl3 MFC set to  0.000000
10/7/2011	4:44:10 PM	PHl3 MFC set to  0.000000
10/7/2011	4:44:10 PM	SiCl4 MFC set to  0.000000
10/7/2011	4:44:10 PM	Bypass solenoid MFC set to  0.000000
10/7/2011	4:44:10 PM	Tube furnace set to 0
10/7/2011	4:44:40 PM	H2 valve closed
10/7/2011	4:44:40 PM	BCl3 valve closed
10/7/2011	4:44:40 PM	PH3 valve closed
10/7/2011	4:44:40 PM	SiCl4 pre valve closed
10/7/2011	4:44:40 PM	SiCl4 post valve closed
10/7/2011	4:44:40 PM	Bypass valve closed
10/7/2011	4:44:40 PM	Bubbler valve closed
10/7/2011	4:44:40 PM	Helium valve opened
10/7/2011	4:44:40 PM	Main Vac valve opened
10/7/2011	4:44:40 PM	Helium MFC set to  20.000000
10/7/2011	4:44:40 PM	H2 MFC set to  0.000000
10/7/2011	4:44:40 PM	BCl3 MFC set to  0.000000
10/7/2011	4:44:40 PM	PHl3 MFC set to  0.000000
10/7/2011	4:44:40 PM	SiCl4 MFC set to  0.000000
10/7/2011	4:44:40 PM	Bypass solenoid MFC set to  0.000000
10/7/2011	4:44:40 PM	Tube furnace set to 0
10/7/2011	4:45:11 PM	Helium valve closed
10/7/2011	4:45:11 PM	H2 valve closed
10/7/2011	4:45:11 PM	BCl3 valve closed
10/7/2011	4:45:11 PM	PH3 valve closed
10/7/2011	4:45:11 PM	SiCl4 pre valve closed
10/7/2011	4:45:11 PM	SiCl4 post valve closed
10/7/2011	4:45:11 PM	Bypass valve closed
10/7/2011	4:45:11 PM	Bubbler valve closed
10/7/2011	4:45:11 PM	Main Vac valve opened
10/7/2011	4:45:11 PM	Helium MFC set to  0.000000
10/7/2011	4:45:11 PM	H2 MFC set to  0.000000
10/7/2011	4:45:11 PM	BCl3 MFC set to  0.000000
10/7/2011	4:45:11 PM	PHl3 MFC set to  0.000000
10/7/2011	4:45:11 PM	SiCl4 MFC set to  0.000000
10/7/2011	4:45:11 PM	Bypass solenoid MFC set to  0.000000
10/7/2011	4:45:11 PM	Tube furnace set to 0
10/7/2011	4:45:12 PM	Run finished at 4:45 PM
10/7/2011	4:45:12 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/7/2011	6:13:19 PM	Recipe started at 6:13 PM
10/7/2011	6:13:19 PM	Helium valve closed
10/7/2011	6:13:19 PM	H2 valve closed
10/7/2011	6:13:19 PM	BCl3 valve closed
10/7/2011	6:13:19 PM	PH3 valve closed
10/7/2011	6:13:19 PM	SiCl4 pre valve closed
10/7/2011	6:13:19 PM	SiCl4 post valve closed
10/7/2011	6:13:19 PM	Main Vac valve closed
10/7/2011	6:13:19 PM	Bypass valve closed
10/7/2011	6:13:19 PM	Bubbler valve closed
10/7/2011	6:13:19 PM	Helium MFC set to  0.000000
10/7/2011	6:13:19 PM	H2 MFC set to  0.000000
10/7/2011	6:13:19 PM	BCl3 MFC set to  0.000000
10/7/2011	6:13:19 PM	PHl3 MFC set to  0.000000
10/7/2011	6:13:19 PM	SiCl4 MFC set to  0.000000
10/7/2011	6:13:19 PM	Bypass solenoid MFC set to  0.000000
10/7/2011	6:13:20 PM	Tube furnace set to 0
10/7/2011	6:13:23 PM	Helium valve closed
10/7/2011	6:13:23 PM	BCl3 valve closed
10/7/2011	6:13:23 PM	PH3 valve closed
10/7/2011	6:13:23 PM	SiCl4 pre valve closed
10/7/2011	6:13:23 PM	SiCl4 post valve closed
10/7/2011	6:13:23 PM	Main Vac valve closed
10/7/2011	6:13:23 PM	Bypass valve closed
10/7/2011	6:13:23 PM	Bubbler valve closed
10/7/2011	6:13:23 PM	H2 valve opened
10/7/2011	6:13:23 PM	Helium MFC set to  0.000000
10/7/2011	6:13:23 PM	H2 MFC set to  500.000000
10/7/2011	6:13:23 PM	BCl3 MFC set to  0.000000
10/7/2011	6:13:23 PM	PHl3 MFC set to  0.000000
10/7/2011	6:13:23 PM	SiCl4 MFC set to  0.000000
10/7/2011	6:13:23 PM	Bypass solenoid MFC set to  0.000000
10/7/2011	6:13:23 PM	Tube furnace set to 0
10/7/2011	6:14:30 PM	Helium valve closed
10/7/2011	6:14:30 PM	BCl3 valve closed
10/7/2011	6:14:30 PM	PH3 valve closed
10/7/2011	6:14:30 PM	SiCl4 pre valve closed
10/7/2011	6:14:30 PM	SiCl4 post valve closed
10/7/2011	6:14:30 PM	Main Vac valve closed
10/7/2011	6:14:30 PM	Bypass valve closed
10/7/2011	6:14:30 PM	H2 valve opened
10/7/2011	6:14:30 PM	Bubbler valve opened
10/7/2011	6:14:30 PM	Helium MFC set to  0.000000
10/7/2011	6:14:30 PM	H2 MFC set to  500.000000
10/7/2011	6:14:30 PM	BCl3 MFC set to  0.000000
10/7/2011	6:14:30 PM	PHl3 MFC set to  0.000000
10/7/2011	6:14:30 PM	SiCl4 MFC set to  0.000000
10/7/2011	6:14:30 PM	Bypass solenoid MFC set to  0.000000
10/7/2011	6:14:30 PM	Tube furnace set to 0
10/7/2011	6:14:31 PM	Helium valve closed
10/7/2011	6:14:31 PM	BCl3 valve closed
10/7/2011	6:14:31 PM	PH3 valve closed
10/7/2011	6:14:31 PM	SiCl4 pre valve closed
10/7/2011	6:14:31 PM	SiCl4 post valve closed
10/7/2011	6:14:31 PM	Main Vac valve closed
10/7/2011	6:14:31 PM	Bypass valve closed
10/7/2011	6:14:31 PM	H2 valve opened
10/7/2011	6:14:31 PM	Bubbler valve opened
10/7/2011	6:14:31 PM	Helium MFC set to  0.000000
10/7/2011	6:14:31 PM	H2 MFC set to  500.000000
10/7/2011	6:14:31 PM	BCl3 MFC set to  0.000000
10/7/2011	6:14:31 PM	PHl3 MFC set to  0.000000
10/7/2011	6:14:31 PM	SiCl4 MFC set to  0.000000
10/7/2011	6:14:31 PM	Bypass solenoid MFC set to  0.000000
10/7/2011	6:14:31 PM	Tube furnace set to 1000
10/7/2011	6:34:31 PM	Helium valve closed
10/7/2011	6:34:31 PM	PH3 valve closed
10/7/2011	6:34:31 PM	SiCl4 post valve closed
10/7/2011	6:34:31 PM	Main Vac valve closed
10/7/2011	6:34:31 PM	Bypass valve closed
10/7/2011	6:34:31 PM	H2 valve opened
10/7/2011	6:34:31 PM	BCl3 valve opened
10/7/2011	6:34:31 PM	SiCl4 pre valve opened
10/7/2011	6:34:31 PM	Bubbler valve opened
10/7/2011	6:34:31 PM	Helium MFC set to  0.000000
10/7/2011	6:34:31 PM	H2 MFC set to  500.000000
10/7/2011	6:34:31 PM	BCl3 MFC set to  2.000000
10/7/2011	6:34:31 PM	PHl3 MFC set to  0.000000
10/7/2011	6:34:31 PM	SiCl4 MFC set to  50.000000
10/7/2011	6:34:31 PM	Bypass solenoid MFC set to  0.000000
10/7/2011	6:34:31 PM	Tube furnace set to 1000
10/7/2011	6:34:33 PM	Helium valve closed
10/7/2011	6:34:33 PM	PH3 valve closed
10/7/2011	6:34:33 PM	Main Vac valve closed
10/7/2011	6:34:33 PM	Bypass valve closed
10/7/2011	6:34:33 PM	H2 valve opened
10/7/2011	6:34:33 PM	BCl3 valve opened
10/7/2011	6:34:33 PM	SiCl4 pre valve opened
10/7/2011	6:34:33 PM	SiCl4 post valve opened
10/7/2011	6:34:33 PM	Bubbler valve opened
10/7/2011	6:34:33 PM	Helium MFC set to  0.000000
10/7/2011	6:34:33 PM	H2 MFC set to  500.000000
10/7/2011	6:34:33 PM	BCl3 MFC set to  2.000000
10/7/2011	6:34:33 PM	PHl3 MFC set to  0.000000
10/7/2011	6:34:33 PM	SiCl4 MFC set to  50.000000
10/7/2011	6:34:33 PM	Bypass solenoid MFC set to  0.000000
10/7/2011	6:34:34 PM	Tube furnace set to 1000
10/7/2011	6:49:34 PM	Helium valve closed
10/7/2011	6:49:34 PM	BCl3 valve closed
10/7/2011	6:49:34 PM	PH3 valve closed
10/7/2011	6:49:34 PM	SiCl4 pre valve closed
10/7/2011	6:49:34 PM	SiCl4 post valve closed
10/7/2011	6:49:34 PM	Main Vac valve closed
10/7/2011	6:49:34 PM	Bypass valve closed
10/7/2011	6:49:34 PM	H2 valve opened
10/7/2011	6:49:34 PM	Bubbler valve opened
10/7/2011	6:49:34 PM	Helium MFC set to  0.000000
10/7/2011	6:49:34 PM	H2 MFC set to  500.000000
10/7/2011	6:49:34 PM	BCl3 MFC set to  0.000000
10/7/2011	6:49:34 PM	PHl3 MFC set to  0.000000
10/7/2011	6:49:34 PM	SiCl4 MFC set to  0.000000
10/7/2011	6:49:34 PM	Bypass solenoid MFC set to  0.000000
10/7/2011	6:49:34 PM	Tube furnace set to 950
10/7/2011	6:54:34 PM	Helium valve closed
10/7/2011	6:54:34 PM	BCl3 valve closed
10/7/2011	6:54:34 PM	PH3 valve closed
10/7/2011	6:54:34 PM	SiCl4 pre valve closed
10/7/2011	6:54:34 PM	SiCl4 post valve closed
10/7/2011	6:54:34 PM	Main Vac valve closed
10/7/2011	6:54:34 PM	Bypass valve closed
10/7/2011	6:54:34 PM	H2 valve opened
10/7/2011	6:54:34 PM	Bubbler valve opened
10/7/2011	6:54:34 PM	Helium MFC set to  0.000000
10/7/2011	6:54:34 PM	H2 MFC set to  500.000000
10/7/2011	6:54:34 PM	BCl3 MFC set to  0.000000
10/7/2011	6:54:34 PM	PHl3 MFC set to  0.000000
10/7/2011	6:54:34 PM	SiCl4 MFC set to  0.000000
10/7/2011	6:54:34 PM	Bypass solenoid MFC set to  0.000000
10/7/2011	6:54:34 PM	Tube furnace set to 850
10/7/2011	6:59:34 PM	H2 valve closed
10/7/2011	6:59:34 PM	BCl3 valve closed
10/7/2011	6:59:34 PM	PH3 valve closed
10/7/2011	6:59:34 PM	SiCl4 pre valve closed
10/7/2011	6:59:34 PM	SiCl4 post valve closed
10/7/2011	6:59:34 PM	Main Vac valve closed
10/7/2011	6:59:34 PM	Bypass valve closed
10/7/2011	6:59:34 PM	Helium valve opened
10/7/2011	6:59:34 PM	Bubbler valve opened
10/7/2011	6:59:34 PM	Helium MFC set to  500.000000
10/7/2011	6:59:34 PM	H2 MFC set to  0.000000
10/7/2011	6:59:34 PM	BCl3 MFC set to  0.000000
10/7/2011	6:59:34 PM	PHl3 MFC set to  0.000000
10/7/2011	6:59:34 PM	SiCl4 MFC set to  0.000000
10/7/2011	6:59:34 PM	Bypass solenoid MFC set to  0.000000
10/7/2011	6:59:34 PM	Tube furnace set to 0
10/7/2011	7:16:26 PM	Helium valve closed
10/7/2011	7:16:26 PM	H2 valve closed
10/7/2011	7:16:26 PM	BCl3 valve closed
10/7/2011	7:16:26 PM	PH3 valve closed
10/7/2011	7:16:26 PM	SiCl4 pre valve closed
10/7/2011	7:16:26 PM	SiCl4 post valve closed
10/7/2011	7:16:26 PM	Main Vac valve closed
10/7/2011	7:16:26 PM	Bypass valve closed
10/7/2011	7:16:26 PM	Bubbler valve closed
10/7/2011	7:16:26 PM	Helium MFC set to  0.000000
10/7/2011	7:16:26 PM	H2 MFC set to  0.000000
10/7/2011	7:16:26 PM	BCl3 MFC set to  0.000000
10/7/2011	7:16:26 PM	PHl3 MFC set to  0.000000
10/7/2011	7:16:26 PM	SiCl4 MFC set to  0.000000
10/7/2011	7:16:26 PM	Bypass solenoid MFC set to  0.000000
10/7/2011	7:16:26 PM	Tube furnace set to 0
10/7/2011	7:16:27 PM	Run finished at 7:16 PM
10/7/2011	7:18:30 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/7/2011	7:18:31 PM	Recipe started at 7:18 PM
10/7/2011	7:18:31 PM	Helium valve closed
10/7/2011	7:18:31 PM	H2 valve closed
10/7/2011	7:18:31 PM	BCl3 valve closed
10/7/2011	7:18:31 PM	PH3 valve closed
10/7/2011	7:18:31 PM	SiCl4 pre valve closed
10/7/2011	7:18:31 PM	SiCl4 post valve closed
10/7/2011	7:18:31 PM	Main Vac valve closed
10/7/2011	7:18:31 PM	Bubbler valve closed
10/7/2011	7:18:31 PM	Bypass valve opened
10/7/2011	7:18:31 PM	Helium MFC set to  0.000000
10/7/2011	7:18:31 PM	H2 MFC set to  0.000000
10/7/2011	7:18:31 PM	BCl3 MFC set to  0.000000
10/7/2011	7:18:31 PM	PHl3 MFC set to  0.000000
10/7/2011	7:18:31 PM	SiCl4 MFC set to  0.000000
10/7/2011	7:18:31 PM	Bypass solenoid MFC set to  0.000000
10/7/2011	7:18:31 PM	Tube furnace set to 0
10/7/2011	7:19:33 PM	Helium valve closed
10/7/2011	7:19:33 PM	H2 valve closed
10/7/2011	7:19:33 PM	BCl3 valve closed
10/7/2011	7:19:33 PM	PH3 valve closed
10/7/2011	7:19:33 PM	SiCl4 pre valve closed
10/7/2011	7:19:33 PM	SiCl4 post valve closed
10/7/2011	7:19:33 PM	Main Vac valve closed
10/7/2011	7:19:33 PM	Bubbler valve closed
10/7/2011	7:19:33 PM	Bypass valve opened
10/7/2011	7:19:33 PM	Helium MFC set to  0.000000
10/7/2011	7:19:33 PM	H2 MFC set to  0.000000
10/7/2011	7:19:33 PM	BCl3 MFC set to  0.000000
10/7/2011	7:19:33 PM	PHl3 MFC set to  0.000000
10/7/2011	7:19:33 PM	SiCl4 MFC set to  0.000000
10/7/2011	7:19:33 PM	Bypass solenoid MFC set to  0.000000
10/7/2011	7:19:33 PM	Tube furnace set to 0
10/7/2011	7:20:33 PM	Helium valve closed
10/7/2011	7:20:33 PM	H2 valve closed
10/7/2011	7:20:33 PM	BCl3 valve closed
10/7/2011	7:20:33 PM	PH3 valve closed
10/7/2011	7:20:33 PM	SiCl4 pre valve closed
10/7/2011	7:20:33 PM	SiCl4 post valve closed
10/7/2011	7:20:33 PM	Bypass valve closed
10/7/2011	7:20:33 PM	Bubbler valve closed
10/7/2011	7:20:33 PM	Main Vac valve opened
10/7/2011	7:20:33 PM	Helium MFC set to  0.000000
10/7/2011	7:20:33 PM	H2 MFC set to  0.000000
10/7/2011	7:20:33 PM	BCl3 MFC set to  0.000000
10/7/2011	7:20:33 PM	PHl3 MFC set to  0.000000
10/7/2011	7:20:33 PM	SiCl4 MFC set to  0.000000
10/7/2011	7:20:33 PM	Bypass solenoid MFC set to  0.000000
10/7/2011	7:20:33 PM	Tube furnace set to 0
10/7/2011	7:20:34 PM	Run finished at 7:20 PM
10/7/2011	7:20:35 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/7/2011	9:15:33 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
10/7/2011	9:15:34 PM	Recipe started at 9:15 PM
10/7/2011	9:15:34 PM	Helium valve closed
10/7/2011	9:15:34 PM	H2 valve closed
10/7/2011	9:15:34 PM	BCl3 valve closed
10/7/2011	9:15:34 PM	PH3 valve closed
10/7/2011	9:15:34 PM	SiCl4 pre valve closed
10/7/2011	9:15:34 PM	SiCl4 post valve closed
10/7/2011	9:15:34 PM	Main Vac valve closed
10/7/2011	9:15:34 PM	Bypass valve closed
10/7/2011	9:15:34 PM	Bubbler valve closed
10/7/2011	9:15:34 PM	Helium MFC set to  0.000000
10/7/2011	9:15:34 PM	H2 MFC set to  0.000000
10/7/2011	9:15:34 PM	BCl3 MFC set to  0.000000
10/7/2011	9:15:34 PM	PHl3 MFC set to  0.000000
10/7/2011	9:15:34 PM	SiCl4 MFC set to  0.000000
10/7/2011	9:15:34 PM	Bypass solenoid MFC set to  0.000000
10/7/2011	9:15:34 PM	Tube furnace set to 0
10/7/2011	9:15:34 PM	Run finished at 9:15 PM
10/7/2011	9:15:34 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
10/7/2011	9:15:43 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/7/2011	9:15:44 PM	Recipe started at 9:15 PM
10/7/2011	9:15:44 PM	Helium valve closed
10/7/2011	9:15:44 PM	H2 valve closed
10/7/2011	9:15:44 PM	BCl3 valve closed
10/7/2011	9:15:44 PM	PH3 valve closed
10/7/2011	9:15:44 PM	SiCl4 pre valve closed
10/7/2011	9:15:44 PM	SiCl4 post valve closed
10/7/2011	9:15:44 PM	Main Vac valve closed
10/7/2011	9:15:44 PM	Bubbler valve closed
10/7/2011	9:15:44 PM	Bypass valve opened
10/7/2011	9:15:44 PM	Helium MFC set to  0.000000
10/7/2011	9:15:44 PM	H2 MFC set to  0.000000
10/7/2011	9:15:44 PM	BCl3 MFC set to  0.000000
10/7/2011	9:15:44 PM	PHl3 MFC set to  0.000000
10/7/2011	9:15:44 PM	SiCl4 MFC set to  0.000000
10/7/2011	9:15:44 PM	Bypass solenoid MFC set to  0.000000
10/7/2011	9:15:44 PM	Tube furnace set to 0
10/7/2011	9:15:44 PM	Helium valve closed
10/7/2011	9:15:44 PM	H2 valve closed
10/7/2011	9:15:44 PM	BCl3 valve closed
10/7/2011	9:15:44 PM	PH3 valve closed
10/7/2011	9:15:44 PM	SiCl4 pre valve closed
10/7/2011	9:15:44 PM	SiCl4 post valve closed
10/7/2011	9:15:44 PM	Main Vac valve closed
10/7/2011	9:15:44 PM	Bubbler valve closed
10/7/2011	9:15:44 PM	Bypass valve opened
10/7/2011	9:15:44 PM	Helium MFC set to  0.000000
10/7/2011	9:15:44 PM	H2 MFC set to  0.000000
10/7/2011	9:15:44 PM	BCl3 MFC set to  0.000000
10/7/2011	9:15:44 PM	PHl3 MFC set to  0.000000
10/7/2011	9:15:44 PM	SiCl4 MFC set to  0.000000
10/7/2011	9:15:44 PM	Bypass solenoid MFC set to  0.000000
10/7/2011	9:15:44 PM	Tube furnace set to 0
10/7/2011	9:15:50 PM	Helium valve closed
10/7/2011	9:15:50 PM	H2 valve closed
10/7/2011	9:15:50 PM	BCl3 valve closed
10/7/2011	9:15:50 PM	PH3 valve closed
10/7/2011	9:15:50 PM	SiCl4 pre valve closed
10/7/2011	9:15:50 PM	SiCl4 post valve closed
10/7/2011	9:15:50 PM	Bypass valve closed
10/7/2011	9:15:50 PM	Bubbler valve closed
10/7/2011	9:15:50 PM	Main Vac valve opened
10/7/2011	9:15:50 PM	Helium MFC set to  0.000000
10/7/2011	9:15:50 PM	H2 MFC set to  0.000000
10/7/2011	9:15:50 PM	BCl3 MFC set to  0.000000
10/7/2011	9:15:50 PM	PHl3 MFC set to  0.000000
10/7/2011	9:15:50 PM	SiCl4 MFC set to  0.000000
10/7/2011	9:15:50 PM	Bypass solenoid MFC set to  0.000000
10/7/2011	9:15:50 PM	Tube furnace set to 0
10/7/2011	9:15:51 PM	Run finished at 9:15 PM
10/7/2011	9:15:51 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/7/2011	9:16:21 PM	Recipe started at 9:16 PM
10/7/2011	9:16:21 PM	Helium valve closed
10/7/2011	9:16:21 PM	H2 valve closed
10/7/2011	9:16:21 PM	BCl3 valve closed
10/7/2011	9:16:21 PM	PH3 valve closed
10/7/2011	9:16:21 PM	SiCl4 pre valve closed
10/7/2011	9:16:21 PM	SiCl4 post valve closed
10/7/2011	9:16:21 PM	Main Vac valve closed
10/7/2011	9:16:21 PM	Bypass valve closed
10/7/2011	9:16:21 PM	Bubbler valve closed
10/7/2011	9:16:21 PM	Helium MFC set to  0.000000
10/7/2011	9:16:21 PM	H2 MFC set to  0.000000
10/7/2011	9:16:21 PM	BCl3 MFC set to  0.000000
10/7/2011	9:16:21 PM	PHl3 MFC set to  0.000000
10/7/2011	9:16:21 PM	SiCl4 MFC set to  0.000000
10/7/2011	9:16:21 PM	Bypass solenoid MFC set to  0.000000
10/7/2011	9:16:21 PM	Tube furnace set to 0
10/7/2011	9:16:24 PM	Helium valve closed
10/7/2011	9:16:24 PM	BCl3 valve closed
10/7/2011	9:16:24 PM	PH3 valve closed
10/7/2011	9:16:24 PM	SiCl4 pre valve closed
10/7/2011	9:16:24 PM	SiCl4 post valve closed
10/7/2011	9:16:24 PM	Main Vac valve closed
10/7/2011	9:16:24 PM	Bypass valve closed
10/7/2011	9:16:24 PM	Bubbler valve closed
10/7/2011	9:16:24 PM	H2 valve opened
10/7/2011	9:16:24 PM	Helium MFC set to  0.000000
10/7/2011	9:16:24 PM	H2 MFC set to  500.000000
10/7/2011	9:16:24 PM	BCl3 MFC set to  0.000000
10/7/2011	9:16:24 PM	PHl3 MFC set to  0.000000
10/7/2011	9:16:24 PM	SiCl4 MFC set to  0.000000
10/7/2011	9:16:24 PM	Bypass solenoid MFC set to  0.000000
10/7/2011	9:16:24 PM	Tube furnace set to 0
10/7/2011	9:17:29 PM	Helium valve closed
10/7/2011	9:17:29 PM	BCl3 valve closed
10/7/2011	9:17:29 PM	PH3 valve closed
10/7/2011	9:17:29 PM	SiCl4 pre valve closed
10/7/2011	9:17:29 PM	SiCl4 post valve closed
10/7/2011	9:17:29 PM	Main Vac valve closed
10/7/2011	9:17:29 PM	Bypass valve closed
10/7/2011	9:17:29 PM	H2 valve opened
10/7/2011	9:17:29 PM	Bubbler valve opened
10/7/2011	9:17:29 PM	Helium MFC set to  0.000000
10/7/2011	9:17:29 PM	H2 MFC set to  500.000000
10/7/2011	9:17:29 PM	BCl3 MFC set to  0.000000
10/7/2011	9:17:29 PM	PHl3 MFC set to  0.000000
10/7/2011	9:17:29 PM	SiCl4 MFC set to  0.000000
10/7/2011	9:17:29 PM	Bypass solenoid MFC set to  0.000000
10/7/2011	9:17:29 PM	Tube furnace set to 0
10/7/2011	9:17:30 PM	Helium valve closed
10/7/2011	9:17:30 PM	BCl3 valve closed
10/7/2011	9:17:30 PM	PH3 valve closed
10/7/2011	9:17:30 PM	SiCl4 pre valve closed
10/7/2011	9:17:30 PM	SiCl4 post valve closed
10/7/2011	9:17:30 PM	Main Vac valve closed
10/7/2011	9:17:30 PM	Bypass valve closed
10/7/2011	9:17:30 PM	H2 valve opened
10/7/2011	9:17:30 PM	Bubbler valve opened
10/7/2011	9:17:30 PM	Helium MFC set to  0.000000
10/7/2011	9:17:30 PM	H2 MFC set to  500.000000
10/7/2011	9:17:30 PM	BCl3 MFC set to  0.000000
10/7/2011	9:17:30 PM	PHl3 MFC set to  0.000000
10/7/2011	9:17:30 PM	SiCl4 MFC set to  0.000000
10/7/2011	9:17:30 PM	Bypass solenoid MFC set to  0.000000
10/7/2011	9:17:31 PM	Tube furnace set to 1000
10/7/2011	9:37:30 PM	Helium valve closed
10/7/2011	9:37:30 PM	PH3 valve closed
10/7/2011	9:37:30 PM	SiCl4 post valve closed
10/7/2011	9:37:30 PM	Main Vac valve closed
10/7/2011	9:37:30 PM	Bypass valve closed
10/7/2011	9:37:30 PM	H2 valve opened
10/7/2011	9:37:31 PM	BCl3 valve opened
10/7/2011	9:37:31 PM	SiCl4 pre valve opened
10/7/2011	9:37:31 PM	Bubbler valve opened
10/7/2011	9:37:31 PM	Helium MFC set to  0.000000
10/7/2011	9:37:31 PM	H2 MFC set to  500.000000
10/7/2011	9:37:31 PM	BCl3 MFC set to  2.000000
10/7/2011	9:37:31 PM	PHl3 MFC set to  0.000000
10/7/2011	9:37:31 PM	SiCl4 MFC set to  50.000000
10/7/2011	9:37:31 PM	Bypass solenoid MFC set to  0.000000
10/7/2011	9:37:31 PM	Tube furnace set to 1000
10/7/2011	9:37:33 PM	Helium valve closed
10/7/2011	9:37:33 PM	PH3 valve closed
10/7/2011	9:37:33 PM	Main Vac valve closed
10/7/2011	9:37:33 PM	Bypass valve closed
10/7/2011	9:37:33 PM	H2 valve opened
10/7/2011	9:37:33 PM	BCl3 valve opened
10/7/2011	9:37:33 PM	SiCl4 pre valve opened
10/7/2011	9:37:33 PM	SiCl4 post valve opened
10/7/2011	9:37:33 PM	Bubbler valve opened
10/7/2011	9:37:33 PM	Helium MFC set to  0.000000
10/7/2011	9:37:33 PM	H2 MFC set to  500.000000
10/7/2011	9:37:33 PM	BCl3 MFC set to  2.000000
10/7/2011	9:37:33 PM	PHl3 MFC set to  0.000000
10/7/2011	9:37:33 PM	SiCl4 MFC set to  50.000000
10/7/2011	9:37:33 PM	Bypass solenoid MFC set to  0.000000
10/7/2011	9:37:33 PM	Tube furnace set to 1000
10/7/2011	9:52:33 PM	Helium valve closed
10/7/2011	9:52:33 PM	BCl3 valve closed
10/7/2011	9:52:33 PM	PH3 valve closed
10/7/2011	9:52:33 PM	SiCl4 pre valve closed
10/7/2011	9:52:33 PM	SiCl4 post valve closed
10/7/2011	9:52:33 PM	Main Vac valve closed
10/7/2011	9:52:33 PM	Bypass valve closed
10/7/2011	9:52:33 PM	H2 valve opened
10/7/2011	9:52:33 PM	Bubbler valve opened
10/7/2011	9:52:33 PM	Helium MFC set to  0.000000
10/7/2011	9:52:33 PM	H2 MFC set to  500.000000
10/7/2011	9:52:33 PM	BCl3 MFC set to  0.000000
10/7/2011	9:52:33 PM	PHl3 MFC set to  0.000000
10/7/2011	9:52:33 PM	SiCl4 MFC set to  0.000000
10/7/2011	9:52:33 PM	Bypass solenoid MFC set to  0.000000
10/7/2011	9:52:33 PM	Tube furnace set to 950
10/7/2011	9:57:33 PM	Helium valve closed
10/7/2011	9:57:33 PM	BCl3 valve closed
10/7/2011	9:57:33 PM	PH3 valve closed
10/7/2011	9:57:33 PM	SiCl4 pre valve closed
10/7/2011	9:57:33 PM	SiCl4 post valve closed
10/7/2011	9:57:33 PM	Main Vac valve closed
10/7/2011	9:57:33 PM	Bypass valve closed
10/7/2011	9:57:33 PM	H2 valve opened
10/7/2011	9:57:33 PM	Bubbler valve opened
10/7/2011	9:57:33 PM	Helium MFC set to  0.000000
10/7/2011	9:57:33 PM	H2 MFC set to  500.000000
10/7/2011	9:57:33 PM	BCl3 MFC set to  0.000000
10/7/2011	9:57:33 PM	PHl3 MFC set to  0.000000
10/7/2011	9:57:33 PM	SiCl4 MFC set to  0.000000
10/7/2011	9:57:33 PM	Bypass solenoid MFC set to  0.000000
10/7/2011	9:57:33 PM	Tube furnace set to 850
10/7/2011	10:02:33 PM	H2 valve closed
10/7/2011	10:02:33 PM	BCl3 valve closed
10/7/2011	10:02:33 PM	PH3 valve closed
10/7/2011	10:02:33 PM	SiCl4 pre valve closed
10/7/2011	10:02:33 PM	SiCl4 post valve closed
10/7/2011	10:02:33 PM	Main Vac valve closed
10/7/2011	10:02:33 PM	Bypass valve closed
10/7/2011	10:02:33 PM	Helium valve opened
10/7/2011	10:02:33 PM	Bubbler valve opened
10/7/2011	10:02:33 PM	Helium MFC set to  500.000000
10/7/2011	10:02:33 PM	H2 MFC set to  0.000000
10/7/2011	10:02:33 PM	BCl3 MFC set to  0.000000
10/7/2011	10:02:33 PM	PHl3 MFC set to  0.000000
10/7/2011	10:02:33 PM	SiCl4 MFC set to  0.000000
10/7/2011	10:02:33 PM	Bypass solenoid MFC set to  0.000000
10/7/2011	10:02:33 PM	Tube furnace set to 0
10/7/2011	10:14:54 PM	Helium valve closed
10/7/2011	10:14:54 PM	H2 valve closed
10/7/2011	10:14:54 PM	BCl3 valve closed
10/7/2011	10:14:54 PM	PH3 valve closed
10/7/2011	10:14:54 PM	SiCl4 pre valve closed
10/7/2011	10:14:54 PM	SiCl4 post valve closed
10/7/2011	10:14:54 PM	Main Vac valve closed
10/7/2011	10:14:54 PM	Bypass valve closed
10/7/2011	10:14:54 PM	Bubbler valve closed
10/7/2011	10:14:54 PM	Helium MFC set to  0.000000
10/7/2011	10:14:54 PM	H2 MFC set to  0.000000
10/7/2011	10:14:54 PM	BCl3 MFC set to  0.000000
10/7/2011	10:14:54 PM	PHl3 MFC set to  0.000000
10/7/2011	10:14:54 PM	SiCl4 MFC set to  0.000000
10/7/2011	10:14:54 PM	Bypass solenoid MFC set to  0.000000
10/7/2011	10:14:54 PM	Tube furnace set to 0
10/7/2011	10:14:55 PM	Run finished at 10:14 PM
10/7/2011	10:21:46 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/7/2011	10:21:47 PM	Recipe started at 10:21 PM
10/7/2011	10:21:47 PM	Helium valve closed
10/7/2011	10:21:47 PM	H2 valve closed
10/7/2011	10:21:47 PM	BCl3 valve closed
10/7/2011	10:21:47 PM	PH3 valve closed
10/7/2011	10:21:47 PM	SiCl4 pre valve closed
10/7/2011	10:21:47 PM	SiCl4 post valve closed
10/7/2011	10:21:47 PM	Main Vac valve closed
10/7/2011	10:21:47 PM	Bubbler valve closed
10/7/2011	10:21:47 PM	Bypass valve opened
10/7/2011	10:21:47 PM	Helium MFC set to  0.000000
10/7/2011	10:21:47 PM	H2 MFC set to  0.000000
10/7/2011	10:21:47 PM	BCl3 MFC set to  0.000000
10/7/2011	10:21:47 PM	PHl3 MFC set to  0.000000
10/7/2011	10:21:47 PM	SiCl4 MFC set to  0.000000
10/7/2011	10:21:47 PM	Bypass solenoid MFC set to  0.000000
10/7/2011	10:21:47 PM	Tube furnace set to 0
10/7/2011	10:22:51 PM	Helium valve closed
10/7/2011	10:22:51 PM	H2 valve closed
10/7/2011	10:22:51 PM	BCl3 valve closed
10/7/2011	10:22:51 PM	PH3 valve closed
10/7/2011	10:22:51 PM	SiCl4 pre valve closed
10/7/2011	10:22:51 PM	SiCl4 post valve closed
10/7/2011	10:22:51 PM	Main Vac valve closed
10/7/2011	10:22:51 PM	Bubbler valve closed
10/7/2011	10:22:51 PM	Bypass valve opened
10/7/2011	10:22:51 PM	Helium MFC set to  0.000000
10/7/2011	10:22:51 PM	H2 MFC set to  0.000000
10/7/2011	10:22:51 PM	BCl3 MFC set to  0.000000
10/7/2011	10:22:51 PM	PHl3 MFC set to  0.000000
10/7/2011	10:22:51 PM	SiCl4 MFC set to  0.000000
10/7/2011	10:22:51 PM	Bypass solenoid MFC set to  0.000000
10/7/2011	10:22:52 PM	Tube furnace set to 0
10/7/2011	10:23:52 PM	Helium valve closed
10/7/2011	10:23:52 PM	H2 valve closed
10/7/2011	10:23:52 PM	BCl3 valve closed
10/7/2011	10:23:52 PM	PH3 valve closed
10/7/2011	10:23:52 PM	SiCl4 pre valve closed
10/7/2011	10:23:52 PM	SiCl4 post valve closed
10/7/2011	10:23:52 PM	Bypass valve closed
10/7/2011	10:23:52 PM	Bubbler valve closed
10/7/2011	10:23:52 PM	Main Vac valve opened
10/7/2011	10:23:52 PM	Helium MFC set to  0.000000
10/7/2011	10:23:52 PM	H2 MFC set to  0.000000
10/7/2011	10:23:52 PM	BCl3 MFC set to  0.000000
10/7/2011	10:23:52 PM	PHl3 MFC set to  0.000000
10/7/2011	10:23:52 PM	SiCl4 MFC set to  0.000000
10/7/2011	10:23:52 PM	Bypass solenoid MFC set to  0.000000
10/7/2011	10:23:52 PM	Tube furnace set to 0
10/7/2011	10:23:53 PM	Run finished at 10:23 PM
10/7/2011	10:23:53 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
